PLATEN CLAMPING SURFACE MONITORING
PETRY KLAUS, SUURONEN DAVID E, DECKER LUCKE KURT, BLAKE JULIAN, CARROLL JAMES
Year of Publication 04.12.2014
Get full text
Year of Publication 04.12.2014
Patent
HIGH CONDUCTIVITY ELECTROSTATIC CHUCK
DONNELL STEVEN, VENKATRAMAN CHANDRA, SUURONEN DAVID, STONE LYUDMILA, BLAKE JULIAN, STONE DALE K, COOKE RICHARD A
Year of Publication 03.02.2014
Get full text
Year of Publication 03.02.2014
Patent
TRIBOELECTRIC CHARGE CONTROLLED ELECTRO-STATIC CLAMP
OSHIRO SHIGEO, BLAKE JULIAN G, STONE LYUDMILA, STONE DALE K, SUURONEN DAVID. E
Year of Publication 17.01.2014
Get full text
Year of Publication 17.01.2014
Patent
HIGH SURFACE RESISTIVITY ELECTROSTATIC CHUCK
STONE LYUDMILA, SUURONEN DAVID, BLAKE JULIAN, STONE DALE K, COOKE RICHARD A
Year of Publication 08.08.2013
Get full text
Year of Publication 08.08.2013
Patent
REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
PETRY KLAUS, BLAKE JULIAN G, STONE LYUDMILA, SUURONEN DAVID, STONE DALE K
Year of Publication 28.03.2012
Get full text
Year of Publication 28.03.2012
Patent
A PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A METHOD THEREOF
SUURONEN DAVID, RIAF ARTHUR P, MACINTOSH EDWARD. D, STONE DALE K, OSHIRO SHIGEO S
Year of Publication 15.04.2011
Get full text
Year of Publication 15.04.2011
Patent
PLATEN TO CONTROL CHARGE ACCUMULATION
STONE, Dale, SUURONEN, David, STONE, Lyudmila, BLAKE, Julian, AMMON, Frederick
Year of Publication 19.03.2020
Get full text
Year of Publication 19.03.2020
Patent
Platen For Reducing Particle Contamination On A Substrate and a Method Thereof
Stone, Dale K, Suuronen, David E, MacIntosh, Edward D, Oshiro, Shigeo, Riaf, Arthur P
Year of Publication 16.08.2018
Get full text
Year of Publication 16.08.2018
Patent
Platen for reducing particle contamination on a substrate and a method thereof
Stone, Dale K, Suuronen, David E, MacIntosh, Edward D, Oshiro, Shigeo, Riaf, Arthur P
Year of Publication 24.04.2018
Get full text
Year of Publication 24.04.2018
Patent