Sequential sputter and reactive precleans of vias and contacts
COHEN, BARNEY M, NUGYAN, KENNEY KING-TYE, RENGARAJAN, SURAJU, DEIN, PEJAN, LEE, SHANBIN
Year of Publication 01.12.2002
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Year of Publication 01.12.2002
Patent
METHOD OF PRE-CLEANING DIELECTRIC LAYER OF SUBSTRATE
COHEN BARNEY M, SURAJU RENGARAJAN, NGAN KENNY KING-TAI, LI XIANGBING, DING PEIJUN
Year of Publication 22.06.2001
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Year of Publication 22.06.2001
Patent
SEQUENTIAL SPUTTER AND REACTIVE PRECLEANING OF VIA-HOLE AND CONTACT
SURAJU RENGARAJAN, BARNEY M COHEN, PEJAN DEIN, SHANBIN LEE, KENNEY KING-TYE NUGYAN
Year of Publication 30.03.2001
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Year of Publication 30.03.2001
Patent