Flash memory process using polysilicon spacers
Su, Wen-Doe, Chang, Thomas, Sung, Kuo-Tung, Tseng, Mao Song, Lai, Shih-Chi, Sung, Kun-Yu, Lin, Liang-Chen
Year of Publication 02.04.2002
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Year of Publication 02.04.2002
Patent
Flash memory process using polysilicon spacers
SU WEN-DOE, LIN LIANGN, LAI SHIHI, SUNG KUN-YU, CHANG THOMAS, TSENG MAO SONG, SUNG KUO-TUNG
Year of Publication 02.04.2002
Get full text
Year of Publication 02.04.2002
Patent