Method for depositing tungsten thin film
KIM DONG WOO, HAN TAE SUNG, SUN WOO HOON, YOON WON JUN, CHOI SEOK KYU
Year of Publication 30.12.2020
Get full text
Year of Publication 30.12.2020
Patent
Method for treating substrate and the semiconductor device manufactured by using the same
HAN TAE SUNG, KIM DONG WOO, YOON WON JUN, SUN WOO HOON, CHOI SEOK KYU, PARK JIN WU
Year of Publication 10.09.2021
Get full text
Year of Publication 10.09.2021
Patent
Method of Forming Contact Plug in Semiconductor Integrated Circuit
HAN TAE SUNG, KIM DONG WOO, YOON WON JUN, SUN WOO HOON, CHOI SEOK KYU, PARK JIN WU
Year of Publication 26.05.2021
Get full text
Year of Publication 26.05.2021
Patent
Substrate processing apparatus capable of controlling process temperature
HAN TAE SUNG, KIM DONG WOO, SUN WOO HOON, YOON WON JUN, CHOI SEOK KYU
Year of Publication 18.05.2020
Get full text
Year of Publication 18.05.2020
Patent
Methods of forming tungsten nucleation layer
KIM DONG WOO, LEE KEON JUNG, SUN WOO HOON, YOON WON JUN, KWON JU YEON, CHOI SEOK KYU, PARK JIN WU
Year of Publication 25.02.2022
Get full text
Year of Publication 25.02.2022
Patent
Method of Manufacturing Semiconductor Device
PARK, YOUNG HOON, YI, IN HWAN, YOON, WON JUN, SHIN, HYUN CHYOL, SUN, WOO HOON
Year of Publication 04.08.2017
Get full text
Year of Publication 04.08.2017
Patent
Method of fabricating thin film
PARK, YOUNG HOON, YI, IN HWAN, JUNG, JAE HOON, YOON, WON JUN, SUN, WOO HOON, SHIN, HYUN CHYOL
Year of Publication 27.10.2017
Get full text
Year of Publication 27.10.2017
Patent
Method of forming a contact plug in a semiconductor integrated circuit device
Han, Tae Sung, Yoon, Won Jun, Sun, Woo Hoon, Park, Jin Wu, Choi, Seok Kyu, Kim, Dong Woo
Year of Publication 25.10.2022
Get full text
Year of Publication 25.10.2022
Patent
METHOD OF FORMING A CONTACT PLUG IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
YOON, Won Jun, KIM, Dong Woo, SUN, Woo Hoon, HAN, Tae Sung, CHOI, Seok Kyu, PARK, Jin Wu
Year of Publication 30.06.2022
Get full text
Year of Publication 30.06.2022
Patent
TWI771917B
HAN, TAE SUNG, CHOI, SEOK KYU, KIM, DONG WOO, PARK, JIN WU, YOON, WON JUN, SUN, WOO HOON
Year of Publication 21.07.2022
Get full text
Year of Publication 21.07.2022
Patent
Contact plug forming method of semiconductor integrated circuit device
HAN TAE-SUNG, PARK JIN-WOO, KIM DONG WOO, SUN WOO-HOON, CHOI SEOK-KYU, YUN WON-JUN
Year of Publication 24.06.2022
Get full text
Year of Publication 24.06.2022
Patent
Substrate processing method and semiconductor device manufactured using the same
YOON, WON-JUN, KIM, DONG-WOO, CHOI, SEOK-KYU, PARK, JIN-WU, HAN, TAE-SUNG, SUN, WOO-HOON
Year of Publication 01.01.2022
Get full text
Year of Publication 01.01.2022
Patent
SUBSTRATE PROCESSING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME
KIM DONG-WOO, HAN TAE-SUNG, SUN WOO-HOON, YOON WON-JUN, CHOI SEOK-KYU, PARK JIN-WU
Year of Publication 03.09.2021
Get full text
Year of Publication 03.09.2021
Patent
Semiconductor element graphene barrier film deposition method
KIM TAE-SUNG, KIM DONG WOO, LI JIANZHENG, SUN WOO-HOON, PARK JI-HYE, PARK HONG-KI, JEON JIN HO, YUN WON-JUN
Year of Publication 10.03.2023
Get full text
Year of Publication 10.03.2023
Patent