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Year of Publication 02.07.2020
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Year of Publication 24.12.2019
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Year of Publication 31.05.2019
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ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR FIN FIELD EFFECT TRANSISTOR FORMATION
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Year of Publication 23.05.2019
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Year of Publication 30.08.2018
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Year of Publication 15.05.2018
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SYSTEMS AND METHODS FOR PERFORMING IN-SITU DEPOSITION OF SIDEWALL IMAGE TRANSFER SPACERS
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Year of Publication 16.03.2017
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ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR FIN FIELD EFFECT TRANSISTOR FORMATION
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Year of Publication 25.04.2017
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Year of Publication 29.11.2017
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Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
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