Effects of hydrogen plasma pretreatment on characteristics of copper film deposited by remote plasma CVD using (hfac)Cu(TMVS)
Lee, Jong-Hyun, Lee, Jeong-Hwan, Hwang, Ki-Ju, Kim, Jung-Yeul, Suk, Chang-Gil, Choi, Sie-Young
Published in Thin solid films (31.10.2000)
Published in Thin solid films (31.10.2000)
Get full text
Journal Article
Conference Proceeding
APPARATUS FOR FIRING SUBSTRATES
KONG, DAE YOUNG, KIM, KYEONG SIN, KANG, CHANG HOON, YUN, SUNG HO, SEO, KYU CHUL, SUK, CHANG GIL
Year of Publication 24.08.2015
Get full text
Year of Publication 24.08.2015
Patent
TEXTURING METHOD FOR SOLAR CELL SUBSTRATE AND THE SOLAR CELL SUBSTRATE USING THE METHOD
KONG, DAE YOUNG, CHO, CHAN SUB, LEE, JONG HYUN, YOON, SUNG HO, SUK, CHANG GIL
Year of Publication 14.04.2014
Get full text
Year of Publication 14.04.2014
Patent
PECVD SHOWERHEAD WITH INDUCTIVELY COUPLED PLASMA SOURCE
KANG, CHANG HOON, CHOI, JIN GKWANG, YUN, SUNG HO, SEO, KYU CHUL, SUK, CHANG GIL
Year of Publication 06.10.2011
Get full text
Year of Publication 06.10.2011
Patent
SPRAY COATING APPARATUS AND METHOD TO EFFICIENTLY REDUCE QUANTITY OF USED PHOTORESIST
PARK, TAE GYU, KIM, JUN TAE, LEE, DONG CHEOL, KANG, SUN SEOK, SUK, CHANG GIL
Year of Publication 09.11.2004
Get full text
Year of Publication 09.11.2004
Patent