Electrolyte and method for cobalt electrodeposition
THIAM, MIKAILOU, BERTHON, HERMINE MARIE, KIM, YEESEUL, DOUSSOT, CELINE PASCALE, SUHR, DOMINIQUE
Year of Publication 21.08.2023
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Year of Publication 21.08.2023
Patent
Electrografted Copper Seed Layer for High Aspect Ratio TSVs Interposer Metallization
Gaillard, Frédéric, Mourier, Thierry, Vandroux, Laurent, Religieux, Laurianne, Suhr, Dominique, Raynal, Frédéric, Mevellec, Vincent
Published in Meeting abstracts (Electrochemical Society) (05.08.2014)
Published in Meeting abstracts (Electrochemical Society) (05.08.2014)
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Journal Article