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Published in ECS transactions (28.04.2006)
Published in ECS transactions (28.04.2006)
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HEATING PART OF SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, CONVECTION PATTERN CONTROL METHOD FOR SILICON MELT, SILICON SINGLE CRYSTAL MANUFACTURING METHOD, SILICON WAFER MANUFACTURING METHOD, SILICON SINGLE CRYSTAL MANUFACTURING DEVICE, AND CONVECTION PATTERN CONTROL SYSTEM FOR SILICON MELT
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Patent
Wafer Strength and Slip Generation Behavior in 300 mm Wafers
Ono, Toshiaki, Sugimura, Wataru, Kihara, Takayuki, Hourai, Masataka
Published in ECS transactions (28.04.2006)
Published in ECS transactions (28.04.2006)
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Journal Article
SILICON SINGLE CRYSTAL MANUFACTURING METHOD, AND SILICON SINGLE CRYSTAL MANUFACTURING APPARATUS
MURAMATSU Yu, YOKOYAMA Ryusuke, SUGIMURA Wataru, MATSUSHIMA Naoki, SAKAMOTO Hideki
Year of Publication 31.10.2024
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Year of Publication 31.10.2024
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SILICON SINGLE CRYSTAL PRODUCTION METHOD AND SILICON SINGLE CRYSTAL PRODUCTION APPARATUS
YOKOYAMA Ryusuke, SUGIMURA Wataru, MATSUSHIMA Naoki, YOTSUI Takuya, SAKAMOTO Hideki
Year of Publication 10.10.2024
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Year of Publication 10.10.2024
Patent