FORMING METHOD FOR PATTERN AND SEMICONDUCTOR DEVICE EMPLOYING THE SAME
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Year of Publication 25.04.1989
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Year of Publication 25.04.1989
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PATTERN DETECTOR
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Year of Publication 01.12.1987
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Year of Publication 01.12.1987
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ULTRASONIC MOTOR, USING METHOD AND PRESERVING METHOD THEREFOR
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Year of Publication 08.04.1997
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Year of Publication 08.04.1997
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ULTRASONIC MOTOR, USING METHOD AND PRESERVING METHOD THEREFOR
SUGIMOTO ARITOSHI, SUGINOYA HIDEKIYO, YAMADA SATORU, MIZUMOTO MUNEO, MATSUI KAZUO, KURUSU HIROYUKI, TAKAHATA DAISUKE, MIZUNO FUMIO
Year of Publication 08.04.1997
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Year of Publication 08.04.1997
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ULTRASONIC MOTOR, USING METHOD AND PRESERVING METHOD THEREFOR
SUGIMOTO ARITOSHI, SUGINOYA HIDEKIYO, YAMADA SATORU, MIZUMOTO MUNEO, MATSUI KAZUO, KURUSU HIROYUKI, TAKAHATA DAISUKE, MIZUNO FUMIO
Year of Publication 08.04.1997
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Year of Publication 08.04.1997
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PATTERN INSPECTION DEVICE AND ITS MANUFACTURE
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Year of Publication 03.03.2000
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Year of Publication 03.03.2000
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FORMING METHOD OF RESIST PATTERN
SUGIMOTO ARITOSHI, KADOTA KAZUYA, SATO FUMIYOSHI, OZAKI KATSUMI, NOZAKI KATSUHIRO
Year of Publication 21.11.1986
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Year of Publication 21.11.1986
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Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
SUGIMOTO; ARITOSHI, TAKAGI; YUJI, TANAKA; MAKI, WATANABE; MASAHIRO, SHINADA; HIROYUKI, NOZOE; MARI, HIROI; TAKASHI, KUNI; ASAHIRO, MATSUYAMA; YUKIO
Year of Publication 16.11.1999
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Year of Publication 16.11.1999
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Method of inspecting a pattern on a substrate
NINOMIYA TAKANORI, HIROI TAKASHI, MAEDA SHUNJI, YODA HARUO, NOZOE MARI, USAMI YASUTSUGU, TANAKA MAKI, SHINODA HIROYUKI, SHISHIDO CHIE, DOI HIDEAKI, WATANABE MASAHIRO, KUNI ASAHIRO, SUGIMOTO ARITOSHI, TAKAFUJI ATSUKO
Year of Publication 23.04.2002
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Year of Publication 23.04.2002
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Method of inspecting a pattern on a substrate
Shishido, Chie, Hiroi, Takashi, Yoda, Haruo, Watanabe, Masahiro, Kuni, Asahiro, Tanaka, Maki, Ninomiya, Takanori, Doi, Hideaki, Maeda, Shunji, Nozoe, Mari, Shinoda, Hiroyuki, Takafuji, Atsuko, Sugimoto, Aritoshi, Usami, Yasutsugu
Year of Publication 23.04.2002
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Year of Publication 23.04.2002
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RESIST
UENO TAKUMI, SUGIMOTO ARITOSHI, KADOTA KAZUYA, SATOU FUMIYOSHI, SHIRAISHI HIROSHI
Year of Publication 19.07.1985
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Year of Publication 19.07.1985
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Method and apparatus for X-ray analyses
SUGIMOTO; ARITOSHI, NINOMIYA; KEN, KURE; TOKUO, NISHIDA; TAKASHI, MITSUI; YASUHIRO, SHICHI; HIROYASU, KURODA; KATSUHIRO, TODOKORO; HIDEO, SUDO; YOSHIMI
Year of Publication 02.03.1999
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Year of Publication 02.03.1999
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Method of inspecting pattern and apparatus thereof
NINOMIYA TAKANORI, HIROI TAKASHI, MAEDA SHUNJI, YODA HARUO, NOZOE MARI, USAMI YASUTSUGU, TANAKA MAKI, SHINODA HIROYUKI, SHISHIDO CHIE, DOI HIDEAKI, WATANABE MASAHIRO, KUNI ASAHIRO, SUGIMOTO ARITOSHI, TAKAFUJI ATSUKO
Year of Publication 18.10.2001
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Year of Publication 18.10.2001
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Method of inspecting pattern and apparatus thereof
Hiroi, Takashi, Shishido, Chie, Yoda, Haruo, Watanabe, Masahiro, Kuni, Asahiro, Tanaka, Maki, Ninomiya, Takanori, Doi, Hideaki, Maeda, Shunji, Nozoe, Mari, Shinoda, Hiroyuki, Takafuji, Atsuko, Sugimoto, Aritoshi, Usami, Yasutsugu
Year of Publication 18.10.2001
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Year of Publication 18.10.2001
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Fabrication method of semiconductor integrated circuit device and method for making photomask
TANAKA, TOSHIHIKO, SUGIMOTO, ARITOSHI, HASEGAWA, NORIO, TERASAWA, TSUNEO
Year of Publication 01.08.2004
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Year of Publication 01.08.2004
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Method of inspecting pattern and apparatus thereof with a differential brightness image detection
NINOMIYA TAKANORI, HIROI TAKASHI, MAEDA SHUNJI, YODA HARUO, NOZOE MARI, USAMI YASUTSUGU, TANAKA MAKI, SHINODA HIROYUKI, SHISHIDO CHIE, DOI HIDEAKI, WATANABE MASAHIRO, KUNI ASAHIRO, SUGIMOTO ARITOSHI, TAKAFUJI ATSUKO
Year of Publication 22.05.2001
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Year of Publication 22.05.2001
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