Apparatus for inspecting defects of devices and method of inspecting defects
SUGIMOTO ARITOSHI, SEKIHARA ISAMU, ISHITANI TOHRU, TOMIMATSU SATOSHI, AZUMA JUNZO, KOIKE HIDEMI, UMEMURA KAORU
Year of Publication 16.09.2004
Get full text
Year of Publication 16.09.2004
Patent
FOREIGN MATTER INSPECTION METHOD AND APPARATUS THEREOF
SUGIMOTO ARITOSHI, TAGUCHI JUNICHI, IKODA MASAMI, INOUE HIROKO, ARAYA WAKANA
Year of Publication 24.12.1999
Get full text
Year of Publication 24.12.1999
Patent
INSPECTING METHOD AND DEVICE FOR FOREIGN MATTERS
SUGIMOTO ARITOSHI, TAGUCHI JUNICHI, WATANABE TETSUYA, IKODA MASAMI, INOUE HIROKO
Year of Publication 05.11.1999
Get full text
Year of Publication 05.11.1999
Patent
METHOD OF AND APPARATUS FOR INSPECTING CIRCUIT PATTERN
SUGIMOTO ARITOSHI, SAEKI KEIICHI, NOZOE MARI, MORIOKA HIROSHI, WATANABE KENJI, TANAKA MAKI, SHINADA HIROYUKI, MIYAI YASUSHI
Year of Publication 03.06.2004
Get full text
Year of Publication 03.06.2004
Patent
Apparatus for inspecting defects of devices and method of inspecting defects
SUGIMOTO ARITOSHI, SEKIHARA ISAMU, ISHITANI TOHRU, TOMIMATSU SATOSHI, AZUMA JUNZO, KOIKE HIDEMI, UMEMURA KAORU
Year of Publication 11.05.2004
Get full text
Year of Publication 11.05.2004
Patent
Apparatus for detecting defect in device and method of detecting defect
Ishitani, Tohru, Koike, Hidemi, Sugimoto, Aritoshi, Sekihara, Isamu, Umemura, Kaoru, Tomimatsu, Satoshi, Azuma, Junzo
Year of Publication 11.05.2004
Get full text
Year of Publication 11.05.2004
Patent
METHOD AND DEVICE FOR INSPECTING FOREIGN MATTER
SUGIMOTO ARITOSHI, OOGAYA KAORU, TAGUCHI JUNICHI, IKODA MASAMI, INOUE HIROKO
Year of Publication 30.07.1999
Get full text
Year of Publication 30.07.1999
Patent
Inspecting method and apparatus for repeated micro-miniature patterns
Taguchi, Junichi, Sugimoto, Aritoshi, Ikoto, Masami, Inoue, Yuko, Watanabe, Tetsuya, Shinke, Wakana
Year of Publication 11.03.2004
Get full text
Year of Publication 11.03.2004
Patent
Inspecting method and apparatus for repeated micro-miniature patterns
SUGIMOTO ARITOSHI, TAGUCHI JUNICHI, INOUE YUKO, WATANABE TETSUYA, SHINKE WAKANA, IKOTO MASAMI
Year of Publication 11.03.2004
Get full text
Year of Publication 11.03.2004
Patent
Method of inspecting circuit pattern and inspecting instrument
SUGIMOTO ARITOSHI, NOZOE MARI, SAIKI KEIICHI, MORIOKA HIROSHI, WATANABE KENJI, TANAKA MAKI, SHINADA HIROYUKI, MIYAI HIROSHI
Year of Publication 09.03.2004
Get full text
Year of Publication 09.03.2004
Patent
Method of inspecting circuit pattern and inspecting instrument
Nozoe, Mari, Shinada, Hiroyuki, Watanabe, Kenji, Saiki, Keiichi, Sugimoto, Aritoshi, Morioka, Hiroshi, Tanaka, Maki, Miyai, Hiroshi
Year of Publication 09.03.2004
Get full text
Year of Publication 09.03.2004
Patent
Inspecting method and apparatus for repeated micro-miniature patterns
SUGIMOTO ARITOSHI, TAGUCHI JUNICHI, INOUE YUKO, WATANABE TETSUYA, SHINKE WAKANA, IKOTA MASAMI
Year of Publication 09.12.2003
Get full text
Year of Publication 09.12.2003
Patent
Inspecting method and apparatus for repeated micro-miniature patterns
Taguchi, Junichi, Sugimoto, Aritoshi, Ikota, Masami, Inoue, Yuko, Watanabe, Tetsuya, Shinke, Wakana
Year of Publication 09.12.2003
Get full text
Year of Publication 09.12.2003
Patent
METHOD AND DEVICE FOR FOREIGN MATTER INSPECTION
SUGIMOTO ARITOSHI, TAGUCHI JUNICHI, WATANABE TETSUYA, IKODA MASAMI, INOUE HIROKO
Year of Publication 26.02.1999
Get full text
Year of Publication 26.02.1999
Patent
Method of inspecting circuit pattern and inspecting instrument
Shinada, Hiroyuki, Nozoe, Mari, Watanabe, Kenji, Saiki, Keiichi, Sugimoto, Aritoshi, Morioka, Hiroshi, Tanaka, Maki, Miyai, Hiroshi
Year of Publication 06.11.2003
Get full text
Year of Publication 06.11.2003
Patent
Method of inspecting circuit pattern and inspecting instrument
SUGIMOTO ARITOSHI, NOZOE MARI, SAIKI KEIICHI, MORIOKA HIROSHI, WATANABE KENJI, TANAKA MAKI, SHINADA HIROYUKI, MIYAI HIROSHI
Year of Publication 06.11.2003
Get full text
Year of Publication 06.11.2003
Patent