Characterization of Microcrystalline Silicon Thin Film Transistors Fabricated by Thermal Plasma Jet Crystallization Technique
Higashi, Seiichiro, Sugakawa, Kenji, Kaku, Hirotaka, Okada, Tatsuya, Miyazaki, Seiichi
Published in Japanese Journal of Applied Physics (01.03.2010)
Published in Japanese Journal of Applied Physics (01.03.2010)
Get full text
Journal Article
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD
FUKUSHIMA HIDEYUKI, FUJIWARA MAKOTO, SUGAKAWA KENJI, KOHAMA NORIFUMI, IKEMOTO DAISUKE
Year of Publication 22.08.2024
Get full text
Year of Publication 22.08.2024
Patent
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD
SUGIHARA SHINTARO, FUKUSHIMA HIDEYUKI, WADA NORIO, SUGAKAWA KENJI, KOHAMA NORIFUMI, MOTODA KIMIO
Year of Publication 23.08.2024
Get full text
Year of Publication 23.08.2024
Patent