Experimental validity of double-curling probe method in film-depositing plasma
Ogawa, Daisuke, Nakamura, Keiji, Sugai, Hideo
Published in Plasma sources science & technology (01.08.2021)
Published in Plasma sources science & technology (01.08.2021)
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Journal Article
Real-time curling probe monitoring of dielectric layer deposited on plasma chamber wall
Hotta, Masaya, Ogawa, Daisuke, Nakamura, Keiji, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.04.2018)
Published in Japanese Journal of Applied Physics (01.04.2018)
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Journal Article
Microwave plasma generation by the fast rotation and slow pulsation of resonant fields in a cylindrical cavity
Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.04.2017)
Published in Japanese Journal of Applied Physics (01.04.2017)
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Journal Article
Simulation of resistive microwave resonator probe for high-pressure plasma diagnostics
Xu, Jinzhou, Nakamura, Keji, Zhang, Qi, Sugai, Hideo
Published in Plasma sources science & technology (01.11.2009)
Published in Plasma sources science & technology (01.11.2009)
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Journal Article
Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas
Ueyama, Toshinari, Fukunaga, Yusuke, Tsutsumi, Takayoshi, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Sekine, Makoto, Iwata, Manabu, Ohya, Yoshinobu, Sugai, Hideo, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.06.2017)
Published in Japanese Journal of Applied Physics (01.06.2017)
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Journal Article
In situ Probe of GaN Film Surfaces under Plasma Conditions by Photoluminescence Technique
Chen, Miao-Gen, Nakamura, Keiji, Nakano, Yoshitaka, Zhang, Gao-Hui, Sugai, Hideo
Published in Applied physics express (01.07.2012)
Published in Applied physics express (01.07.2012)
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Journal Article
Analysis of precursors for crystal growth of YBaCuO thin films in magnetron sputtering deposition
Fukaya, Kota, Sasaki, Koichi, Gao, Junsi, Kimura, Taishi, Watanabe, Mitsuhiro, Inoue, Masumi, Fujimaki, Akira, Sugai, Hideo
Published in Thin solid films (27.02.2009)
Published in Thin solid films (27.02.2009)
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