Search Results - "SUGAI HIDEO" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

PLASMA REACTOR HAVING DIGITAL CONTROL OVER ROTATION FREQUENCY OF A MICROWAVE FIELD WITH DIRECT UP-CONVERSION

PLASMA REACTOR HAVING DIGITAL CONTROL OVER ROTATION FREQUENCY OF A MICROWAVE FIELD WITH DIRECT UP-CONVERSION

by Lubomirsky, Dmitry, Kobayashi, Satoru, Ramaswamy, Kartik, Park, Soonam, Sugai, Hideo
Year of Publication 11.04.2019

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Patent

Systems and methods for radial and azimuthal control of plasma uniformity

Systems and methods for radial and azimuthal control of plasma uniformity

by Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 26.01.2021

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Patent

Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 2. Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces

Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 2. Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces

by TOYODA, Hirotaka, SUGAI, Hideo
Published in Purazuma Kaku Yūgō Gakkai shi (1999)

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Journal Article

Energy measurements of sheath-accelerated secondary electrons in plasma immersion ion implantation

Energy measurements of sheath-accelerated secondary electrons in plasma immersion ion implantation

by NAKAMURA, Keiji, TANAKA, Mitsuaki, SUGAI, Hideo
Published in Surface & coatings technology (2003)

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Conference Proceeding

Plasma reactor

Plasma reactor

by LUBOMIRSKY, DMITRY, TRAN, TOAN, KOBAYASHI, SATORU, PARK, SOONAM, SUGAI, HIDEO
Year of Publication 16.12.2023

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Patent

Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion

Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion

by Lubomirsky, Dmitry, Kobayashi, Satoru, Ramaswamy, Kartik, Park, Soonam, Sugai, Hideo
Year of Publication 11.12.2018

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Patent

Low-Z Coatings of Lithium and Hydrogen Behaviors

Low-Z Coatings of Lithium and Hydrogen Behaviors

by Isozumi, Tadashi, Yoshida, Shinji, Sugai, Hideo
Published in Kakuyūgō kenkyū (1988)

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Journal Article

PLASMA GENERATION DEVICE AND MANUFACTURING METHOD USING PLASMA TREATMENT

PLASMA GENERATION DEVICE AND MANUFACTURING METHOD USING PLASMA TREATMENT

by SUGAI HIDEO
Year of Publication 19.07.2007

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Patent

PLASMA ELECTRON DENSITY MEASUREMENT PROBE AND MEASURING INSTRUMENT

PLASMA ELECTRON DENSITY MEASUREMENT PROBE AND MEASURING INSTRUMENT

by NAKAMURA KEIJI, SUGAI HIDEO
Year of Publication 08.03.2012

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Patent

MEASUREMENT PROBE AND MEASUREMENT DEVICE FOR ELECTRON STATE OF PLASMA

MEASUREMENT PROBE AND MEASUREMENT DEVICE FOR ELECTRON STATE OF PLASMA

by NAKAMURA KEIJI, SUGAI HIDEO
Year of Publication 01.03.2012

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Patent

SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY

SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY

by Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 28.11.2019

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Patent

Radial waveguide systems and methods for post-match control of microwaves

Radial waveguide systems and methods for post-match control of microwaves

by Kobayashi Satoru, Lubomirsky Dmitry, Park Soonam, Sugai Hideo
Year of Publication 05.12.2017

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Patent

INJECTION MOLDING APPARATUS FITTED WITH PLASMA GENERATOR AND METHODS OF INJECTION MOLDING AND SURFACE TREATMENT

INJECTION MOLDING APPARATUS FITTED WITH PLASMA GENERATOR AND METHODS OF INJECTION MOLDING AND SURFACE TREATMENT

by SUGAI HIDEO
Year of Publication 30.11.2006

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Patent

Systems and methods for radial and azimuthal control of plasma uniformity

Systems and methods for radial and azimuthal control of plasma uniformity

by Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 01.10.2019

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Patent

METHODS AND APPARATUS FOR DYNAMICAL CONTROL OF RADIAL UNIFORMITY IN MICROWAVE CHAMBERS

METHODS AND APPARATUS FOR DYNAMICAL CONTROL OF RADIAL UNIFORMITY IN MICROWAVE CHAMBERS

by LUBOMIRSKY, DMITRY, KOBAYASHI, SATORU, PARK, SOONAM, SUGAI, HIDEO, SCUDDER, LANCE, BRITZ, DAVID
Year of Publication 20.06.2019

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Patent

COATING COMPOSITION AND METHOD FOR APPLYING THE SAME

COATING COMPOSITION AND METHOD FOR APPLYING THE SAME

by KOBATA, MASAMI, WADA, SEIJI, SUGIURA, KAZUTOSHI, IKUSHIMA, SATOSHI, OKUMURA, YASUMASA, SUGAI, HIDEO, HORIBE, KYOICHI, AIDA, HARUHIKO
Year of Publication 29.04.1999

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Patent

PROBE AND DEVICE FOR MEASURING ELECTRON DENSITY AND ELECTRON TEMPERATURE OF PLASMA

PROBE AND DEVICE FOR MEASURING ELECTRON DENSITY AND ELECTRON TEMPERATURE OF PLASMA

by NAKAMURA KEIJI, SUGAI HIDEO
Year of Publication 17.03.2011

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Patent

GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE

GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE

by Kobayashi Satoru, Lubomirsky Dmitry, Tran Toan, Park Soonam, Sugai Hideo
Year of Publication 04.05.2017

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Patent

GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE

GENERALIZED CYLINDRICAL CAVITY SYSTEM FOR MICROWAVE ROTATION AND IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE

by SUGAI, Hideo, LUBOMIRSKY, Dmitry, KOBAYASHI, Satoru, TRAN, Toan, PARK, Soonam
Year of Publication 04.05.2017

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Patent

Plasma reactor

Plasma reactor

by LUBOMIRSKY, DMITRY, TRAN, TOAN, KOBAYASHI, SATORU, PARK, SOONAM, SUGAI, HIDEO
Year of Publication 16.04.2022

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Patent

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