Lower-temperature growth of hydrogenated amorphous silicon films from inductively coupled silane plasma
GOTO, M, TOYODA, H, KITAGAWA, M, HIRAO, T, SUGAI, H
Published in Japanese Journal of Applied Physics (01.08.1996)
Published in Japanese Journal of Applied Physics (01.08.1996)
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Journal Article
SYSTEM AND METHOD FOR PERFORMING RADIAL DIRECTION CONTROL AND AZIMUTH CONTROL ON PLASMA UNIFORMITY
TRAN TOAN, KOBAYASHI SATORU, NIKOLAI KALNIN, SUGAI HIDEO, PARK SOO-NAM, DMITRY LUBOMIRSKY
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
Patent
Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductively-Coupled Plasma
Kojima, Tetsuya, Ohishi, Akihiro, Toyoda, Hirotaka, Goto, Masashi, Nishitani, Mikihiko, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.01.2001)
Published in Japanese Journal of Applied Physics (01.01.2001)
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Journal Article
Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
Abdel-Fattah, Essam, Ghanashev, Ivan, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.07.2000)
Published in Japanese Journal of Applied Physics (01.07.2000)
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Journal Article
Simple Direct Monitoring of SiH 3 Radical and Particulates in a Silane Plasma with Ultraviolet Transmission Spectroscopy
Toyoda, Hirotaka, Goto, Masashi, Kitagawa, Masatoshi, Hirao, Takashi, Hideo Sugai, Hideo Sugai
Published in Japanese Journal of Applied Physics (01.04.1995)
Published in Japanese Journal of Applied Physics (01.04.1995)
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Journal Article
Self-consistent time-resolved modeling of surface-wave microwave plasma
Ganachev, Ivan, Sugai, Hideo
Published in 2012 Abstracts IEEE International Conference on Plasma Science (01.07.2012)
Published in 2012 Abstracts IEEE International Conference on Plasma Science (01.07.2012)
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Conference Proceeding
Initial boronization of JT-60U tokamak using decaborane
SAIDOH, M, OGIWARA, N, YAGYU, J, SUGIE, T, SAKASAI, A, ASAKURA, N, YAMAGE, M, SUGAI, H, JACKSON, G. L, SHIMADA, M, ARAI, T, HIRATSUKA, H, KOIKE, T, SHIMIZU, M, NINOMIYA, H, NAKAMURA, H, JIMBOU, R
Published in Japanese Journal of Applied Physics (01.07.1993)
Published in Japanese Journal of Applied Physics (01.07.1993)
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Journal Article
A Radio Frequency Driven DC Electron Beam Source
Shaw, Denis M., Watanabe, Masahiro, Collins, George J., Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.07.1999)
Published in Japanese Journal of Applied Physics (01.07.1999)
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Journal Article