Point Defect Reaction in Silicon Wafers by Rapid Thermal Processing at More Than 1300°C Using an Oxidation Ambient
Sudo, Haruo, Nakamura, Kozo, Maeda, Susumu, Okamura, Hideyuki, Izunome, Koji, Sueoka, Koji
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
Get full text
Journal Article
Impact of Rapid Thermal Oxidation at Ultrahigh-Temperatures on Oxygen Precipitation Behavior in Czochralski-Silicon Crystals
Araki, Koji, Maeda, Susumu, Senda, Takeshi, Sudo, Haruo, Saito, Hiroyuki, Izunome, Koji
Published in ECS journal of solid state science and technology (01.01.2013)
Published in ECS journal of solid state science and technology (01.01.2013)
Get full text
Journal Article
Effect of Oxygen Precipitation in Nitrogen-Doped Annealed Silicon Wafers on Thermal Strain Induced by Rapid Thermal Processing
Araki, Koji, Sudo, Haruo, Aoki, Tatsuhiko, Senda, Takeshi, Isogai, Hiromichi, Tsubota, Hiroyuki, Miyashita, Moriya, Matsumura, Hisashi, Saito, Hiroyuki, Maeda, Susumu, Kashima, Kazuhiko, Izunome, Koji
Published in Japanese Journal of Applied Physics (01.08.2010)
Published in Japanese Journal of Applied Physics (01.08.2010)
Get full text
Journal Article
실리콘 웨이퍼의 제조 방법 및 실리콘 웨이퍼
MAEDA SUSUMU, MATSUMURA HISASHI, YAMASHITA TORU, AOKI TATSUHIKO, SUDO HARUO
Year of Publication 15.09.2023
Get full text
Year of Publication 15.09.2023
Patent
SILICON WAFER PRODUCTION METHOD, AND SILICON WAFER
MAEDA SUSUMU, YAMASHITA TORU, AOKI TATSUHIKO, MATSUMURA TAKASHI, SUDO HARUO
Year of Publication 06.09.2022
Get full text
Year of Publication 06.09.2022
Patent
METHOD FOR PRODUCING SILICON WAFER, AND SILICON WAFER
AOKI Tatsuhiko, SUDO Haruo, YAMASHITA Toru, MAEDA Susumu, MATSUMURA Hisashi
Year of Publication 01.09.2022
Get full text
Year of Publication 01.09.2022
Patent
HEAT TREATMENT METHOD FOR SILICON WAFER
ONOZUKA KEN, SAITO HIROYUKI, MAEDA SUSUMU, MATSUMURA TAKASHI, SUDO HARUO
Year of Publication 10.06.2021
Get full text
Year of Publication 10.06.2021
Patent
실리콘 웨이퍼 및 실리콘 웨이퍼의 제조 방법
ENDOH TETSUO, MATSUMURA HISASHI, ISHIKAWA TAKASHI, IZUNOME KOJI, FUKUDA ETSUO, AOKI TATSUHIKO, IKEDA SHOJI, SUDO HARUO
Year of Publication 31.01.2023
Get full text
Year of Publication 31.01.2023
Patent