Journey to a Big Data Analysis Platform: Are we there yet?
Goss, Raymond, Subramany, Lokesh
Published in 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (10.05.2021)
Published in 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (10.05.2021)
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Conference Proceeding
Alignment solutions on FBEOL layers using ASML scanners: AEPM: Advanced equipment processes and materials
Samudrala, Pavan, Hart, Gregory, Chen, Yen-Jen, Subramany, Lokesh, Gao, Haiyong, Aung, Nyan, Chung, Woong Jae, Minghetti, Blandine, Mali, Rajan, Khikhlovskyi, Seva, Heres, Pieter
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
CPE run-to-run overlay control for High Volume Manufacturing
Subramany, Lokesh, Woong Jae Chung, Gutjhar, Karsten, Garcia-Medina, Miguel, Sparka, Christian, Yap, Lipkong, Demirer, Onur, Karur-Shanmugam, Ramkumar, Riggs, Brent, Ramanathan, Vidya, Robinson, John C., Pierson, Bill
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure
SEHGAL AKSHEY, VAID ALOK, BELLO ABNER, GU SIPENG, SUBRAMANY LOKESH, HU XIANG
Year of Publication 08.03.2016
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Year of Publication 08.03.2016
Patent
DECOUPLING MEASUREMENT OF LAYER THICKNESSES OF A PLURALITY OF LAYERS OF A CIRCUIT STRUCTURE
SEHGAL AKSHEY, VAID ALOK, BELLO ABNER, GU SIPENG, SUBRAMANY LOKESH, HU XIANG
Year of Publication 16.07.2015
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Year of Publication 16.07.2015
Patent