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Year of Publication 23.08.2023
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Year of Publication 28.04.2023
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SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED PRECURSOR FLOW
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Year of Publication 27.11.2018
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Year of Publication 21.06.2017
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Year of Publication 02.11.2018
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Year of Publication 05.11.2018
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Year of Publication 15.01.2013
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Cover ring for use in semiconductor processing chamber
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Year of Publication 06.08.2024
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Thin substrate handling via edge clamping
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Year of Publication 28.05.2024
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DEPOSITION RING FOR THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
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Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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Year of Publication 27.10.2022
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Systems and methods for internal surface conditioning assessment in plasma processing equipment
Ingle, Nitin K, Lubomirsky, Dmitry, Huang, Jiayin, Suarez, Edwin C, Zhu, Yufei, Park, Soonam
Year of Publication 06.10.2020
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Year of Publication 06.10.2020
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Systems and methods for internal surface conditioning in plasma processing equipment
Ingle, Nitin K, Lubomirsky, Dmitry, Huang, Jiayin, Suarez, Edwin C, Zhu, Yufei, Park, Soonam
Year of Publication 07.07.2020
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Year of Publication 07.07.2020
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