ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
Yang, Wenbing, Chandrashekar, Anand, Su, Teh-Tien, Wood, Michael, Danek, Michal, Kanarik, Keren Jacobs, Lai, Chiukin Steven, Tan, Samantha
Year of Publication 30.09.2021
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Year of Publication 30.09.2021
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Atomic layer etch of tungsten for enhanced tungsten deposition fill
Yang, Wenbing, Chandrashekar, Anand, Su, Teh-Tien, Wood, Michael, Danek, Michal, Kanarik, Keren Jacobs, Lai, Chiukin Steven, Tan, Samantha
Year of Publication 20.07.2021
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Year of Publication 20.07.2021
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ATOMIC LAYER ETCH OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
Yang, Wenbing, Chandrashekar, Anand, Su, Teh-Tien, Wood, Michael, Danek, Michal, Kanarik, Keren Jacobs, Lai, Chiukin Steven, Tan, Samantha
Year of Publication 10.09.2020
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Year of Publication 10.09.2020
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ATOMIC LAYER ETCH OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
Yang, Wenbing, Chandrashekar, Anand, Wood, Michael, Danek, Michal, Kanarik, Keren Jacobs, Lai, Chiukin Steven, Su, Teh-tien, Tan, Samantha
Year of Publication 23.08.2018
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Year of Publication 23.08.2018
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
Yang, Wenbing, Chandrashekar, Anand, Wood, Michael, Danek, Michal, Kanarik, Keren Jacobs, Lai, Chiukin Steven, Su, Teh-tien, Tan, Samantha
Year of Publication 15.05.2018
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Year of Publication 15.05.2018
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
Kanarik Keren Jacobs, Chandrashekar Anand, Wood Michael, Danek Michal, Lai Chiukin Steven, Tan Samantha, Yang Wenbing, Su Teh-tien
Year of Publication 09.02.2017
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Year of Publication 09.02.2017
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Removal of process residues on the backside of a substrate
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Year of Publication 27.12.2011
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Year of Publication 27.12.2011
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
TAN, Samantha S.H, WOOD, Michael, KANARIK, Keren Jacobs, LAI, Chiukin Steven, DANEK, Michal, YANG, Wenbing, SU, Teh-Tien, CHANDRASHEKAR, Anand
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Year of Publication 14.04.2022
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
YANG, WENBING, SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 01.05.2024
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Year of Publication 01.05.2024
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
YANG, WENBING, SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
YANG, WENBING, SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 11.09.2023
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Year of Publication 11.09.2023
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, YANG, WEN-BING, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 01.05.2022
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Year of Publication 01.05.2022
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
YANG, WENBING, SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 30.03.2017
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Year of Publication 30.03.2017
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
SU, TEH-TIEN, DANEK, MICHAL, KANARIK, KEREN JACOBS, YANG, WEN-BING, CHANDRASHEKAR, ANAND, WOOD, MICHAEL, LAI, CHIUKIN STEVEN, TAN, SAMANTHA
Year of Publication 01.11.2021
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Year of Publication 01.11.2021
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Atomic layer etching of tungsten for enhanced tungsten deposition fill
CHANDRASHEKAR ANAND, KEREN JACOBS KANARIK, WOOD MICHAEL, YANG WENBING, LAI CHIUKIN STEVEN, TAN SAMANTHA, DANEK MICHAL, SU TEH-TIEN
Year of Publication 10.09.2021
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Year of Publication 10.09.2021
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