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"SU EASON YU SHEN"
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"SU EASON YU SHEN"
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Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
by
Venkataraman Shyam Sundar
,
Noller Bastian Marten
,
Kingma Arend Jouke
,
Su Eason Yu
-
Shen
Year of Publication
20.12.2016
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Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives
by
Schade Christian
,
Venkataraman Shyam Sundar
,
Usman Ibrahim Sheik Ansar
,
Li Yuzhuo
,
Raman Vijay Immanuel
,
Su Eason Yu
-
Shen
Year of Publication
08.11.2016
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CHEMICAL MECHANICAL POLISHING COMPOSITION COMPRISING POLYVINYL PHOSPHONIC ACID AND ITS DERIVATIVES
by
SCHADE, CHRISTIAN
,
LI, Yuzhuo
,
VENKATARAMAN, SHYAM SUNDAR
,
USMAN IBRAHIM, SHEIK ANSAR
,
RAMAN,VIJAY IMMANUEL
,
YU
-
SHEN
,
Eason Su
Year of Publication
23.07.2018
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CHEMICAL MECHANICAL POLISHING COMPOSITION COMPRISING POLYVINYL PHOSPHONIC ACID AND ITS DERIVATIVES
by
VENKATARAMAN, Shyam Sundar
,
LI, Yuzhuo
,
SCHADE, Christian
,
RAMAN, Vijay Immanuel
,
SU
,
Eason Yu
-
Shen
,
USMAN Ibrahim, Sheik Ansar
,
GAO, Ning
Year of Publication
21.02.2018
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METHOD FOR MANUFACTURING CMP COMPOSITION AND APPLICATION THEREOF
by
YU
-
SHEN
,
EASON SU
,
VENKATARAMAN, SHYAM SUNDAR
Year of Publication
27.06.2013
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CHEMICAL MECHANICAL POLISHING COMPOSITION COMPRISING POLYVINYL PHOSPHONIC ACID AND ITS DERIVATIVES
by
SCHADE, CHRISTIAN
,
LI, YUZHUO
,
YU
-
SHEN
,
EASON SU
,
VENKATARAMAN, SHYAM SUNDAR
,
USMAN IBRAHIM, SHEIK ANSAR
,
RAMAN, VIJAY IMMANUEL
Year of Publication
27.06.2013
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Method for manufacturing cmp composition and application thereof
by
VENKATARAMAN SHYAM SUNDAR
,
YU
-
SHEN EASON SU
Year of Publication
06.08.2014
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Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives
by
VENKATARAMAN SHYAM SUNDAR
,
SCHADE CHRISTIAN
,
USMAN IBRAHIM SHEIK ANSAR
,
LI YUZHUO
,
YU
-
SHEN EASON SU
,
RAMAN VIJAY IMMANUEL
Year of Publication
20.08.2014
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A process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (bpsg) material in the presence of a cmp composition comprising anionic phosphate or phosphonate
by
VENKATARAMAN, SHYAM SUNDAR
,
SU, EASON YU SHEN
Year of Publication
11.02.2017
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METHOD FOR MANUFACTURING CMP COMPOSITION AND APPLICATION THEREOF
by
VENKATARAMAN SHYAM SUNDAR
,
SU EASON YU SHEN
Year of Publication
04.09.2014
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Aqueous Polishing Composition And Process For Chemically Mechanically Polishing Substrates Containing Silicon Oxide Dielectric And Polysilicon Films
by
VENKATARAMAN SHYAM SUNDAR
,
KINGMA AREND JOUKE
,
SU EASON YU-SHEN
,
NOLLER BASTIAN MARTEN
Year of Publication
13.07.2018
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A process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (BPSG) material in the presence of a CMP composition comprising anionic phosphate or phosphonate
by
SU, EASON YU-SHEN
,
VENKATARAMAN, SHYAM SUNDAR
Year of Publication
16.07.2013
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Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives
by
SCHADE, CHRISTIAN
,
LI, YUZHUO
,
VENKATARAMAN, SHYAM SUNDAR
,
USMAN IBRAHIM, SHEIK ANSAR
,
SU, EASON YU SHEN
,
RAMAN, VIJAY IMMANUEL
Year of Publication
21.01.2017
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AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES CONTAINING SILICON OXIDE DIELECTRIC AND POLYSILICON FILMS
by
VENKATARAMAN SHYAM SUNDAR
,
KINGMA AREND JOUKE
,
SU EASON YU SHEN
,
NOLLER BASTIAN MARTEN
Year of Publication
22.11.2013
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Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
by
VENKATARAMAN SHYAM SUNDAR
,
KINGMA AREND JOUKE
,
SU EASON YU-SHEN
,
NOLLER BASTIAN MARTEN
Year of Publication
14.08.2013
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CHEMICAL MECHANICAL POLISHING COMPOSITION COMPRISING POLYVINYL PHOSPHONIC ACID AND ITS DERIVATIVES
by
VENKATARAMAN SHYAM SUNDAR
,
SU EASON YU SHEN
,
SCHADE CHRISTIAN
,
USMAN IBRAHIM SHEIK ANSAR
,
LI YUZHUO
,
RAMAN VIJAY IMMANUEL
Year of Publication
04.09.2014
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Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
by
SU, EASON YU-SHEN
,
KINGMA, AREND JOUKE
,
VENKATARAMAN, SHYAM SUNDAR
,
NOLLER, BASTIAN MARTEN
Year of Publication
01.08.2012
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Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives
by
SU, EASON YU-SHEN
,
SCHADE, CHRISTIAN
,
LI, YUZHUO
,
VENKATARAMAN, SHYAM SUNDAR
,
USMAN IBRAHIM, SHEIK ANSAR
,
RAMAN, VIJAY IMMANUEL
Year of Publication
16.08.2013
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