On the interaction between measurement strategy and control performance in semiconductor manufacturing
Su, An-Jhih, Yu, Cheng-Ching, Ogunnaike, Babatunde A.
Published in Journal of process control (01.03.2008)
Published in Journal of process control (01.03.2008)
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Journal Article
Process trend monitoring using key sensitive index
Jeng, Jyh-Cheng, Su, An-Jhih, Yu, Cheng-Ching, Huang, Hsiao-Ping
Published in AIChE journal (01.09.2007)
Published in AIChE journal (01.09.2007)
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Journal Article
Control relevant issues in semiconductor manufacturing: Overview with some new results
Su, An-Jhih, Jeng, Jyh-Cheng, Huang, Hsiao-Ping, Yu, Cheng-Ching, Hung, Shih-Yu, Chao, Ching-Kong
Published in Control engineering practice (01.10.2007)
Published in Control engineering practice (01.10.2007)
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Journal Article
Conference Proceeding
3D-MiM (MUST-in-MUST) Technology for Advanced System Integration
Su, An-Jhih, Ku, Terry, Tsai, Chung-Hao, Yee, Kuo-Chung, Yu, Douglas
Published in 2019 IEEE 69th Electronic Components and Technology Conference (ECTC) (01.05.2019)
Published in 2019 IEEE 69th Electronic Components and Technology Conference (ECTC) (01.05.2019)
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Conference Proceeding