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Year of Publication 03.10.2018
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Application challenges of capacitive sensors with floating targets
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A Fast Interface for Low-value Capacitive Sensors with Improved Accuracy
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Year of Publication 14.12.2016
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Published in 2010 IEEE International Conference on Industrial Technology (01.03.2010)
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Year of Publication 11.11.2017
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Year of Publication 11.11.2017
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
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Year of Publication 01.08.2019
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Concept evaluation of a high performance self-aligning capacitive displacement sensor
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Published in 2010 IEEE International Conference on Industrial Technology (01.03.2010)
Published in 2010 IEEE International Conference on Industrial Technology (01.03.2010)
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A Measurement Substrate and a Measurement Method
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Year of Publication 02.06.2017
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Year of Publication 02.06.2017
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A MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD
MAKINWA, Kofi, Afolabi, Anthony, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, DE LA ROSETTE, Johannes, Paul, Marie, BLOKS, Ruud, Hendrikus, Martinus, Johannes, NEEFS, Patricius, Jacobus, LAURENT, Thibault, Simon, Mathieu, NIHTIANOV, Stoyan
Year of Publication 01.06.2017
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Year of Publication 01.06.2017
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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OPTICAL MEMBRANE
ZDRAVKOV ALEXANDAR N, JANSSEN PAUL, NIHTIANOV STOYAN, VAN DE KERKHOF MARCUS, MOHAMMADI VAHID, VAN ZWOL PIETER-JAN
Year of Publication 31.03.2020
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Year of Publication 31.03.2020
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Response Time of Silicon Photodiodes for DUV/EUV Radiation
Sha Xia, Sarubi, F., Naulaerts, R., Nihtianov, S., Nanver, L.
Published in 2008 IEEE Instrumentation and Measurement Technology Conference (01.05.2008)
Published in 2008 IEEE Instrumentation and Measurement Technology Conference (01.05.2008)
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Conference Proceeding
Optical membrane
VAN DE KERKHOF, MARCUS ADRIANUS, VAN ZWOL, PIETER-JAN, NIHTIANOV, STOYAN, JANSSEN, PAUL, ZDRAVKOV, ALEKSANDAR NIKOLOV, MOHAMMADI, VAHID
Year of Publication 01.03.2019
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Year of Publication 01.03.2019
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Manufacturing method and using method for component and tool,lithographic apparatus, and detector
GOMMEREN GREGORY MICHA, POT MARTIJN, VAN DER SIJS ARIE JOHAN, JOSEPHUS MARIA KEMPER PETRUS W, PETRUS BAAS GERARDUS WILHELMUS, MARIA HAAST MARC ANTONIUS, NANVER LIS KAREN, NIHTIANOV STOYAN, MOEST BEARRACH, SARUBBI FRANCESCO, JOHANNES SCHUWER ANTONIUS ANDR, SCHOLTES THOMAS LUDOVICUS MARI
Year of Publication 17.06.2015
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Year of Publication 17.06.2015
Patent