이온 주입기 및 이온 주입 장치
PIXLEY JAMES ALAN, HERMANSON ERIC, STONE LYUDMILA, LAYNE PHILIP, STACY THOMAS
Year of Publication 21.04.2021
Get full text
Year of Publication 21.04.2021
Patent
작업물의 온도 균일성을 개선하기 위한 장치
SUN DAWEI, LISCHER D. JEFFREY, STONE LYUDMILA, STONE DALE K, ANELLA STEVEN M
Year of Publication 21.11.2017
Get full text
Year of Publication 21.11.2017
Patent
DIFFUSION RESISTANT ELECTROSTATIC CLAMP
COOKE RICHARD, LIN I KUAN, BLAKE JULIAN G, STONE LYUDMILA, STONE DALE K
Year of Publication 10.10.2016
Get full text
Year of Publication 10.10.2016
Patent
HIGH CONDUCTIVITY ELECTROSTATIC CHUCK
DONNELL STEVEN, VENKATRAMAN CHANDRA, SUURONEN DAVID, STONE LYUDMILA, BLAKE JULIAN, STONE DALE K, COOKE RICHARD A
Year of Publication 03.02.2014
Get full text
Year of Publication 03.02.2014
Patent
TRIBOELECTRIC CHARGE CONTROLLED ELECTRO-STATIC CLAMP
OSHIRO SHIGEO, BLAKE JULIAN G, STONE LYUDMILA, STONE DALE K, SUURONEN DAVID. E
Year of Publication 17.01.2014
Get full text
Year of Publication 17.01.2014
Patent
HIGH SURFACE RESISTIVITY ELECTROSTATIC CHUCK
STONE LYUDMILA, SUURONEN DAVID, BLAKE JULIAN, STONE DALE K, COOKE RICHARD A
Year of Publication 08.08.2013
Get full text
Year of Publication 08.08.2013
Patent
REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
PETRY KLAUS, BLAKE JULIAN G, STONE LYUDMILA, SUURONEN DAVID, STONE DALE K
Year of Publication 28.03.2012
Get full text
Year of Publication 28.03.2012
Patent
Foam in ion implantation system
Pixley, James Alan, Stacy, Thomas, Stone, Lyudmila, Layne, Philip, Hermanson, Eric D
Year of Publication 11.01.2022
Get full text
Year of Publication 11.01.2022
Patent
PLATEN TO CONTROL CHARGE ACCUMULATION
STONE, Dale, SUURONEN, David, STONE, Lyudmila, BLAKE, Julian, AMMON, Frederick
Year of Publication 19.03.2020
Get full text
Year of Publication 19.03.2020
Patent
Enhanced substrate temperature measurement apparatus, system and method
Stone, Dale K, Sun, Dawei, Lischer, D. Jeffrey, Anella, Steven, Serisky, Ron, Chen, Qin, Stone, Lyudmila, Cheng, Chi-Yang
Year of Publication 18.10.2022
Get full text
Year of Publication 18.10.2022
Patent
Foam in ion implantation system
Pixley, James Alan, Stacy, Thomas, Stone, Lyudmila, Layne, Philip, Hermanson, Eric D
Year of Publication 05.05.2020
Get full text
Year of Publication 05.05.2020
Patent
FOAM IN ION IMPLANTATION SYSTEM
Pixley, James Alan, Stacy, Thomas, Stone, Lyudmila, Layne, Philip, Hermanson, Eric D
Year of Publication 12.03.2020
Get full text
Year of Publication 12.03.2020
Patent
FOAM IN ION IMPLANTATION SYSTEM
LAYNE, Philip, STONE, Lyudmila, PIXLEY, James Alan, HERMANSON, Eric, STACY, Thomas
Year of Publication 12.03.2020
Get full text
Year of Publication 12.03.2020
Patent
FOAM IN ION IMPLANTATION SYSTEM
Pixley, James Alan, Stacy, Thomas, Stone, Lyudmila, Layne, Philip, Hermanson, Eric D
Year of Publication 12.03.2020
Get full text
Year of Publication 12.03.2020
Patent