METHOD OF CHEMICAL DEPOSITION OF SEMICONDUCTOR FILMS FROM CHALCOGENIDES OF METALS
STOL'NITS M.M, KOMOV A.N, DOROFEEVA L.L, LENIVKINA I.V, KRICHEVSKAJA T.P, LENIVKIN V.V
Year of Publication 15.04.1994
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Year of Publication 15.04.1994
Patent