Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO 2
Brand, Uwe, Beckert, Erik, Beutler, Andreas, Dai, Gaoliang, Stelzer, Christian, Hertwig, Andreas, Klapetek, Petr, Koglin, Jürgen, Thelen, Richard, Tutsch, Rainer
Published in Measurement science & technology (01.09.2011)
Published in Measurement science & technology (01.09.2011)
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