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Method for producing trenches for DRAM cell configurations
by
Brencher, Lothar
,
Stegememann
,
Maik
,
Rudolph, Uwe
Year of Publication
05.11.2002
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Method for producing trenches for DRAM cell configurations
by
RUDOLPH UWE
,
STEGEMEMANN MAIK
,
BRENCHER LOTHAR
Year of Publication
05.11.2002
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Patent
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basic electric elements
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