Bilayered metal hardmasks for use in Dual Damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
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Method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
SEO SOONON, YANG HAINING, KUMAR KAUSHIK, SIMON ANDREW HERBERT, HOINKIS MARK, LA TULIPE, JR. DOUGLAS C, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY JOSEPH, CLEVENGER LARRY, YANG CHIHAO
Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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Method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
Clevenger, Larry, Dalton, Timothy Joseph, Hoinkis, Mark, Kaldor, Steffen K, Kumar, Kaushik, La Tulipe, Jr, Douglas C, Seo, Soon-Cheon, Simon, Andrew Herbert, Wang, Yun-Yu, Yang, Chih-Chao, Yang, Haining
Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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Back end interconnect with a shaped interface
COWLEY ANDREW P, SIMON ANDREW H, SPOONER TERRY A, SCHACHT JOCHEN, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY J, KALTALIOGLU ERDEM, WANN CLEMENT H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE, JR. DOUGLAS C, YANG CHIHAO
Year of Publication 24.02.2009
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Year of Publication 24.02.2009
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A method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
CLEVENGER LARRY,DALTON TIMOTHY,HOINKIS MARK,KALDOR STEFFEN,KUMAR KAUSHIK,LA TULIPE DOUGLAS JR.,SEO SOONON,SIMON ANDREW,WANG YUN-YU,YANG CHIHAO,YANG HAINING
Year of Publication 16.05.2007
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Year of Publication 16.05.2007
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Bilayered metal hardmasks for use in dual damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 16.12.2004
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Year of Publication 16.12.2004
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Bilayered metal hardmasks for use in dual damascene etch schemes
Kumar, Kaushik, Clevenger, Lawrence, Dalton, Timothy, La Tulipe, Douglas, Cowley, Andy, Kaltalioglu, Erdem, Schacht, Jochen, Simon, Andrew, Hoinkis, Mark, Kaldor, Steffen, Yang, Chih-Chao
Year of Publication 16.12.2004
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Year of Publication 16.12.2004
Patent
Back end interconnect with a shaped interface
Clevenger, Lawrence A, Cowley, Andrew P, Dalton, Timothy J, Hoinkis, Mark, Kaldor, Steffen K, Kaltalioglu, Erdem, Kumar, Kaushik A, La Tulipe, Jr, Douglas C, Schacht, Jochen, Simon, Andrew H, Spooner, Terry A, Wang, Yun-Yu, Wann, Clement H, Yang, Chih-Chao
Year of Publication 17.10.2006
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Year of Publication 17.10.2006
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Crystallographic modification of hard mask properties
COWLEY ANDREW P, SIMON ANDREW H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE, JR. DOUGLAS C, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, DALTON TIMOTHY J
Year of Publication 21.02.2006
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Year of Publication 21.02.2006
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A method for depositing a metal layer on a semiconductor interconnect structure having a capping layer
CLEVENGER LARRY,DALTON TIMOTHY,HOINKIS MARK,KALDOR STEFFEN,KUMAR KAUSHIK,LA TULIPE DOUGLAS JR.,SEO SOONON,SIMON ANDREW,WANG YUN-YU,YANG CHIHAO,YANG HAINING
Year of Publication 14.12.2005
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Year of Publication 14.12.2005
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A METHOD FOR DEPOSITING A METAL LAYER ON A SEMICONDUCTOR INTERCONNECT STRUCTURE HAVING A CAPPING LAYER
DALTON, TIMOTHY, SIMON, ANDREW, YANG, CHIHAO, CLEVENGER, LARRY, SEO, SOONON, WANG, YUN-YU, KALDOR, STEFFEN, KUMAR, KAUSHIK, LA TULIPE, DOUGLAS, JR, HOINKIS, MARK, YANG, HAINING
Year of Publication 07.09.2005
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Year of Publication 07.09.2005
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A METHOD FOR DEPOSITING A METAL LAYER ON A SEMICONDUCTOR INTERCONNECT STRUCTURE HAVING A CAPPING LAYER
DALTON TIMOTHY, YANG HAINING, KUMAR KAUSHIK, LA TULIPE DOUGLAS JR, SIMON ANDREW, YANG CHIH CHAO, KALDOR STEFFEN, HOINKIS MARK, WANG YUN YU, CLEVENGER LARRY, SEO, SOON CHEON
Year of Publication 01.09.2005
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Year of Publication 01.09.2005
Patent
Crystallographic Modification of Hard mask Properties
COWLEY ANDREW P, SIMON ANDREW H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE DOUGLAS C.JR, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, ROSSNAGEL STEPHEN M, DALTON TIMOTHY J
Year of Publication 26.05.2005
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Year of Publication 26.05.2005
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A METHOD FOR DEPOSITING A METAL LAYER ON A SEMICONDUCTOR INTERCONNECT STRUCTURE HAVING A CAPPING LAYER
DALTON, TIMOTHY, SIMON, ANDREW, YANG, CHIHAO, CLEVENGER, LARRY, SEO, SOONON, WANG, YUN-YU, KALDOR, STEFFEN, KUMAR, KAUSHIK, LA TULIPE, DOUGLAS, JR, HOINKIS, MARK, YANG, HAINING
Year of Publication 12.05.2005
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Year of Publication 12.05.2005
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BACK END INTERCONNECT WITH A SHAPED INTERFACE
COWLEY ANDREW P, SIMON ANDREW H, SPOONER TERRY A, SCHACHT JOCHEN, LA TULIPE DOUGLAS C.JR, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY J, KALTALIOGLU ERDEM, WANN CLEMENT H, HOINKIS MARK, KUMAR KAUSHIK A, YANG CHIHAO
Year of Publication 28.12.2006
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Year of Publication 28.12.2006
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Back end interconnect with a shaped interface
COWLEY ANDREW P, SIMON ANDREW H, SPOONER TERRY A, SCHACHT JOCHEN, CLEVENGER LAWRENCE A, KALDOR STEFFEN K, WANG YUN-YU, DALTON TIMOTHY J, KALTALIOGLU ERDEM, WANN CLEMENT H, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE, JR. DOUGLAS C, YANG CHIHAO
Year of Publication 17.10.2006
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Year of Publication 17.10.2006
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SELECTIVE CAPPING AND COPPER RECESS FORMING PROCESS APPLICABLE TO ELECTROLESS DEPOSITION
KUMAR KAUSHIK, HU CHAO-KUN, SANDRA G MARUHOTORA, CHEN SHYNG-TSONG, KRISHNAN MAHADEVAIYER, MICHAEL F ROFARO, KALDOR STEFFEN K, JAMIN FEN F, DALTON TIMOTHY J, DAVIS KENNETH M
Year of Publication 15.07.2004
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Year of Publication 15.07.2004
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Copper recess process with application to selective capping and electroless plating
KUMAR KAUSHIK, MALHOTRA SANDRA G, SIMON ANDREW H, KRISHNAN MAHADEVAIYER, KALDOR STEFFEN K, DALTON TIMOTHY J, DAVIS KENNETH M, SMITH SEAN P. E, HU CHAO-KUN, RATH DAVID L, TSENG WEI-TSU, CHEN SHYNG-TSONG, RUBINO JUDITH M, NARAYAN CHANDRASEKHAR, SAENGER KATHERINE L, JAMIN FEN F, LOFARO MICHAEL F
Year of Publication 20.06.2006
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Year of Publication 20.06.2006
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Copper recess process with application to selective capping and electroless plating
Chen, Shyng-Tsong, Dalton, Timothy J, Davis, Kenneth M, Hu, Chao-Kun, Jamin, Fen F, Kaldor, Steffen K, Krishnan, Mahadevaiyer, Kumar, Kaushik, Lofaro, Michael F, Malhotra, Sandra G, Narayan, Chandrasekhar, Rath, David L, Rubino, Judith M, Saenger, Katherine L, Simon, Andrew H, Smith, Sean P. E, Tseng, Wei-tsu
Year of Publication 20.06.2006
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Year of Publication 20.06.2006
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