Electrochemical deposition of Pd, Ti, and Ge for applications in GaAs technology
SCHÜSSLER, M, STATZNER, T, LIN, C. I, KROZER, V, HORN, J, HARTNAGEL, H. L
Published in Journal of the Electrochemical Society (01.04.1996)
Published in Journal of the Electrochemical Society (01.04.1996)
Get full text
Journal Article