Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
Sumant, Anirudha V., Auciello, Orlando, Carpick, Robert W., Srinivasan, Sudarsan, Butler, James E.
Published in MRS bulletin (01.04.2010)
Published in MRS bulletin (01.04.2010)
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Journal Article