Liquid as template for next generation micro devices
Charmet, Jérôme, Haquette, Henri, Laux, Edith, Gorodyska, Ganna, Textor, Marcus, Durante, Guido Spinola, Portuondo-Campa, Erwin, Knapp, Helmut, Bitterli, Roland, Noell, Wilfried, Keppner, Herbert
Published in Journal of physics. Conference series (01.08.2009)
Published in Journal of physics. Conference series (01.08.2009)
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Journal Article
Control of a Z-axis MEMS vibrational gyroscope
Oboe, R., Antonello, R., Lasalandra, E., Durante, G.S., Prandi, L.
Published in IEEE/ASME transactions on mechatronics (01.08.2005)
Published in IEEE/ASME transactions on mechatronics (01.08.2005)
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Journal Article
Low temperature hermetically sealed, optically transparent miniature packages: from medical to space
James, Rony Jose, Durante, Guido Spinola, Revol, Vincent, Marozau, Ivan, Krasnopolski, Krzysztof, Fretz, Mark, Mohrdiek, Stefan
Published in 2021 IEEE 71st Electronic Components and Technology Conference (ECTC) (01.06.2021)
Published in 2021 IEEE 71st Electronic Components and Technology Conference (ECTC) (01.06.2021)
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Conference Proceeding
Silicon Carbide Pressure Sensors for Harsh Environments
Hoogerwerf, Arno C., Durante, Guido Spinola, James, Rony Jose, Dubois, Marc-Alexandre, Dubochet, Olivier, Despont, Michel
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
A mems-based gas chromatograph front-end for a miniature spectrometer
Hoogerwerf, Arno, Durante, Guido Spinola, Morse, Andrew, Morgan, Geraint, Barber, Simeon, Sheridan, Simon, Wright, Ian
Published in 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.05.2017)
Published in 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.05.2017)
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Conference Proceeding
Microelectromechanical integrated sensor structure with rotary driving motion
ZERBINI, SARAH, SPINOLA DURANTE, GUIDO, BALZELLI LUDOVICO, ALESSANDRO
Year of Publication 30.12.2015
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Year of Publication 30.12.2015
Patent
Microelectromechanical integrated sensor structure with rotary driving motion
Durante, Guido Spinola, Ludovico, Alessandro Balzelli, Zerbini, Sarah
Year of Publication 13.04.2010
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Year of Publication 13.04.2010
Patent
Process for the fabrication of an inertial sensor with failure threshold
Zerbini, Sarah, Merassi, Angelo, Spinola Durante, Guido, De Masi, Biagio
Year of Publication 16.03.2010
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Year of Publication 16.03.2010
Patent