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Compositions and methods for the selective removal of silicon nitride
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Year of Publication 06.11.2014
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Compositions and methods for the selective removal of silicon nitride
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Year of Publication 15.07.2014
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Year of Publication 15.07.2010
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Compositions and methods for selective removal of silicon nitride
YANDERS KEVIN P, BOWERS WILLIAM R, BISCOTTO MARK A, SPARKS EILEEN, COOPER EMANUEL I, KORZENSKI MICHAEL B, THOMAS NICOLE E, SONTHALIA PRERNA
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POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES
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Year of Publication 08.05.1996
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POST TREATMENT OF A COATED SUBSTRATE WITH A GAS CONTAINING EXCITED HALOGEN TO REMOVE RESIDUES
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Year of Publication 26.01.1995
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Year of Publication 30.01.1997
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