Pt thermal atomic layer deposition for silicon x-ray micropore optics
Takeuchi, Kazuma, Ezoe, Yuichiro, Ishikawa, Kumi, Numazawa, Masaki, Terada, Masaru, Ishi, Daiki, Fujitani, Maiko, Sowa, Mark J, Ohashi, Takaya, Mitsuda, Kazuhisa
Published in Applied optics. Optical technology and biomedical optics (20.04.2018)
Published in Applied optics. Optical technology and biomedical optics (20.04.2018)
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Journal Article
Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
Ishi, Daiki, Ezoe, Yuichiro, Ishikawa, Kumi, Numazawa, Masaki, Fukushima, Aoto, Otsubo, Ryota, Suzuki, Hikaru, Yuasa, Tatsuya, Sakuda, Sae, Uchino, Tomoki, Fujitani, Maiko, Mitsuda, Kazuhisa, Sowa, Mark J.
Published in Applied physics express (01.08.2020)
Published in Applied physics express (01.08.2020)
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Journal Article
Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
Kazari, Hanie, Pajootan, Elmira, Sowa, Mark, Coulombe, Sylvain, Hubert, Pascal
Published in Journal of energy storage (01.08.2023)
Published in Journal of energy storage (01.08.2023)
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Journal Article
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Van Meter, Kylie E., Chowdhury, Md Istiaque, Sowa, Mark J., Kozen, Alexander C., Grejtak, Tomas, Babuska, Tomas F., Strandwitz, Nicholas C., Krick, Brandon A.
Published in Wear (15.06.2023)
Published in Wear (15.06.2023)
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Journal Article
Plasma-enhanced atomic layer deposition of titanium vanadium nitride
Sowa, Mark J., Ju, Ling, Kozen, Alexander C., Strandwitz, Nicholas C., Zeng, Guosong, Babuska, Tomas F., Hsain, Zakaria, Krick, Brandon A.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
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Journal Article
Application of Ruthenium Nitride Deposited on Multi-walled Carbon Nanotube Forest as Electrode Material for Supercapacitors
Kazari, Hanie, Pajootan, Elmira, Deguns, Eric, Sowa, Mark, Kao, Emmeline, Coulombe, Sylvain
Published in 2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC) (12.12.2021)
Published in 2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC) (12.12.2021)
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Conference Proceeding
Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
Deguns, Eric, Sowa, Mark J., Dalberth, Mark J., Bhatia, Ritwik, Kanjolia, Ravi, Moser, Dan, Sundaram, Ganesh M., Becker, Jill S.
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
(Invited) Large Format Atomic Layer Deposition
Sundaram, Ganesh M., Bertuch, Adam, Bhatia, Ritwik, Coutu, R., Dalberth, Mark J., Deguns, Eric, Liu, Guo, Sowa, Mark J., Becker, Jill S.
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article