MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS
Lubomirsky, Dmitry, Choy, Martin Yue, Yang, Dongqing, Samir, Mehmet Tugrul, Zhu, Lala, Hillman, Peter, Park, Soonam
Year of Publication 22.11.2018
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Year of Publication 22.11.2018
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SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
Lubomirsky, Dmitry, Choy, Martin Yue, Yang, Dongqing, Samir, Mehmet Tugrul, Zhu, Lala, Hillman, Peter, Park, Soonam
Year of Publication 22.11.2018
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Year of Publication 22.11.2018
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OPTICAL EMISSION SPECTROSCOPY (OES) FOR REMOTE PLASMA MONITORING
Lubomirsky, Dmitry, Kim, Junghoon, Venkataraman, Shankar, Cho, Tae Seung, Park, Soonam
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
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SYSTEMS AND METHODS FOR INTERNAL SURFACE CONDITIONING ASSESSMENT IN PLASMA PROCESSING EQUIPMENT
Ingle, Nitin K, Lubomirsky, Dmitry, Huang, Jiayin, Suarez, Edwin C, Zhu, Yufei, Park, Soonam
Year of Publication 23.08.2018
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Year of Publication 23.08.2018
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SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY
KALNIN, Nikolai, SUGAI, Hideo, LUBOMIRSKY, Dmitry, KOBAYASHI, Satoru, PARK, Soonam, TRAN, Toan
Year of Publication 09.08.2018
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Year of Publication 09.08.2018
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SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY
Lubomirsky, Dmitry, Tran, Toan, Kalnin, Nikolai, Kobayashi, Satoru, Park, Soonam, Sugai, Hideo
Year of Publication 09.08.2018
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Year of Publication 09.08.2018
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Semiconductor processing with DC assisted RF power for improved control
Yang, Jang-Gyoo, Baek, Jonghoon, Venkataraman, Shankar, Garg, Saurabh, Chen, Xinglong, Park, Soonam
Year of Publication 24.07.2018
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Year of Publication 24.07.2018
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Multi-zone semiconductor substrate supports
LUBOMIRSKY, DMITRY, SAMIR, MEHMET TUGRUL, PARK, SOONAM, CHOY, MARTIN YUE, ZHU, LALA, YANG, DONGQING, HILLMAN, PETER
Year of Publication 01.05.2023
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Year of Publication 01.05.2023
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FLOW CONTROL FEATURES OF CVD CHAMBERS
NGUYEN, Hanh D, TRAN, Toan Q, VENKATARAMAN, Shankar, LIANG, Qiwei, CHEN, Xinglong, KHAN, Adib M, CHUC, Kien N, YANG, Jang-Gyoo, LUBOMIRSKY, Dmitry, MILLER, Matthew, PARK, Soonam
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
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Systems and methods for internal surface conditioning assessment in plasma processing equipment
Ingle, Nitin K, Lubomirsky, Dmitry, Huang, Jiayin, Suarez, Edwin C, Zhu, Yufei, Park, Soonam
Year of Publication 08.05.2018
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Year of Publication 08.05.2018
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Flow control features of CVD chambers
Lubomirsky, Dmitry, Khan, Adib, Yang, Jang-Gyoo, Venkataraman, Shankar, Nguyen, Hanh D, Chuc, Kien N, Chen, Xinglong, Miller, Matthew, Park, Soonam, Liang, Qiwei, Tran, Toan Q
Year of Publication 04.02.2020
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Year of Publication 04.02.2020
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