Selective etching of silicon nitride over silicon oxide using ClF3/H2 remote plasma
Lee, Won Oh, Kim, Ki Hyun, Kim, Doo San, Ji, You Jin, Kang, Ji Eun, Tak, Hyun Woo, Park, Jin Woo, Song, Han Dock, Kim, Ki Seok, Cho, Byeong Ok, Kim, Young Lae, Yeom, Geun Young
Published in Scientific reports (05.04.2022)
Published in Scientific reports (05.04.2022)
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Low-temperature synthesis of ammonia borane using diborane and ammonia
Choi, Ho Yun, Park, Sung Jin, Seo, Dongho, Baek, Jong-min, Song, Han Dock, Jung, Sung Jin, Lee, Kun Jong, Kim, Young Lae
Published in International journal of hydrogen energy (21.09.2015)
Published in International journal of hydrogen energy (21.09.2015)
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Effect of hydrofluorocarbon structure of C3H2F6 isomers on high aspect ratio etching of silicon oxide
Tak, Hyun Woo, Lee, Hye Joo, Wen, Long, Kang, Byung Jin, Sung, Dain, Bae, Jeong Woon, Kim, Dong Woo, Lee, Wonseok, Lee, Seung Bae, Kim, Keunsuk, Cho, Byeong Ok, Kim, Young Lea, Song, Han Dock, Yeom, Geun Young
Published in Applied surface science (30.10.2022)
Published in Applied surface science (30.10.2022)
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APPARATUS AND METHOD FOR PURIFYING DIBORANE
SONG, HAN DOCK, JEONG, SEONG JIN, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI
Year of Publication 13.10.2017
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Year of Publication 13.10.2017
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METHOD FOR PURIFYING BORON TRIFLUORIDE
SONG, HAN DOCK, JEONG, SEONG JIN, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI, JUNG, SUK YONG, SUH, DAE WOONG
Year of Publication 19.06.2018
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Year of Publication 19.06.2018
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Method for refining of high purity tetrafluoromethane
KIM, JONG SOO, SONG, HAN DOCK, JEONG, SEONG JIN, LEE, KUN JONG, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN
Year of Publication 04.04.2017
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Year of Publication 04.04.2017
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In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
Park, Jin Woo, Chae, Myeong Gyoon, Kim, Doo San, Lee, Won Oh, Song, Han Dock, Choi, Changhwan, Yeom, Geun Young
Published in Journal of physics. D, Applied physics (07.11.2018)
Published in Journal of physics. D, Applied physics (07.11.2018)
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Apparatus to generate and discharge ammonia
SONG, HAN DOCK, JEONG, SEONG JIN, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI, JUNG, SUK YONG, SUH, DAE WOONG
Year of Publication 04.04.2018
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Year of Publication 04.04.2018
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Apparatus for absorbing ammonia gas
SONG, HAN DOCK, JEONG, SEONG JIN, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI, JUNG, SUK YONG, SUH, DAE WOONG
Year of Publication 04.04.2018
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Year of Publication 04.04.2018
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NaBH 4 를 이용한 암모니아 보란 수소 저장 소재 합성 공정 개발
최호윤, 박성진, 정성진, 백종민, 송한덕, 김종수, 이건종, 김영래, Choi, Ho Yun, Park, Sung Jin, Jung, Sung Jin, Baek, Jong Min, Song, Han Dock, Kim, Jong Soo, Lee, Kun Jong, Kim, Young Lae
Published in 한국수소 및 신에너지학회 논문집 (2014)
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Published in 한국수소 및 신에너지학회 논문집 (2014)
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METHOD OF REGENERATING AMMONIA BORANE USING SUPERCRITICAL FLUIDS
SONG, HAN DOCK, JEONG, SEONG JIN, LEE, KUN JONG, KIM JONG SOO, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, PARK, SUNG JIN
Year of Publication 18.05.2016
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Year of Publication 18.05.2016
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SYSTEM OF REGENERATING AMMONIA BORANE USING SUPERCRITICAL FLUIDS
SONG, HAN DOCK, JEONG, SEONG JIN, LEE, KUN JONG, KIM JONG SOO, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, PARK, SUNG JIN
Year of Publication 18.05.2016
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Year of Publication 18.05.2016
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Method of synthesis and purification for trifluoromethyle hypofluorite
KIM, JONG SOO, SONG, HAN DOCK, JEONG, SEONG JIN, LEE, KUN JONG, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI
Year of Publication 04.04.2017
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Year of Publication 04.04.2017
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SYSTEM FOR PRODUCING METAL AMMINE AND METHOD OF PRODUCING METAL AMMINE USING THE SAME
KIM, JONG SOO, SONG, HAN DOCK, JEONG, SEONG JIN, LEE, KUN JONG, KIM, YOUNG LAE, CHOI, HO YUN, BAEK, JONG MIN, KIM, TAE HYUNG, PARK, SAE MI
Year of Publication 27.03.2017
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Year of Publication 27.03.2017
Patent
In situ dry cleaning of Si wafer using OF 2 /NH 3 remote plasma with low global warming potential
Park, Jin Woo, Chae, Myeong Gyoon, Kim, Doo San, Lee, Won Oh, Song, Han Dock, Choi, Changhwan, Yeom, Geun Young
Published in Journal of physics. D, Applied physics (07.11.2018)
Published in Journal of physics. D, Applied physics (07.11.2018)
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Journal Article
SYSTEM OF PRODUCING AMMONIA BORANE AND METHOD OF PRODUCING AMMONIA BORANE USING THE SAME
SONG, HAN DOCK, JEONG, SEONG JIN, SEO, BONG SOO, LEE, KUN JONG, KIM, YOUNG LAE, LEE, JUN YOUL, HWANG, DEOK HEE, CHOI, HO YUN, BAEK, JONG MIN, PARK, SUNG JIN, SEO, DONG HO, JEONG, JAE MUN
Year of Publication 17.04.2013
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Year of Publication 17.04.2013
Patent
Selective etching of silicon nitride over silicon oxide using ClF 3 /H 2 remote plasma
Lee, Won Oh, Kim, Ki Hyun, Kim, Doo San, Ji, You Jin, Kang, Ji Eun, Tak, Hyun Woo, Park, Jin Woo, Song, Han Dock, Kim, Ki Seok, Cho, Byeong Ok, Kim, Young Lae, Yeom, Geun Young
Published in Scientific reports (05.04.2022)
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Published in Scientific reports (05.04.2022)
Journal Article