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"SON TAE KYU"
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"SON TAE KYU"
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SYSTEM FOR GLOBAL ELECTRONIC COMMERCE
by
SON
,
TAE KYU
Year of Publication
27.01.2021
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INSTRUMENTATION SYSTEM USING ALIGNMENT SCOPE AND METHOD FOR INSTRUMENTATION POSITION
by
AHN, SUNG MIN
,
SON
,
TAE KYU
Year of Publication
27.02.2013
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MEASURING SYSTEM AND MEASURING METHOD
by
PARK, SANG HYUN
,
PARK, SANG WOOK
,
JANG, SANG DON
,
SON
,
TAE KYU
Year of Publication
03.12.2015
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MASKLESS EXPOSURE APPARATUS, METHOD FOR DETERMINING START POSITION AND ORIENTATION OF EXPOSURE SCAN IN MASKLESS LITHOGRAPHY
by
AHN, SUNG MIN
,
JANG, SANG DON
,
SON
,
TAE KYU
Year of Publication
12.04.2012
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INSTRUMENTATION SYSTEM USING ALIGNMENT SCOPE AND METHOD FOR DETERMINING SYSTEM PARAMETERS OF ALIGNMENT SCOPE
by
YANG, SEUNG WON
,
AHN, SUNG MIN
,
SON
,
TAE KYU
Year of Publication
21.02.2012
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INSTRUMENTATION SYSTEM USING ALIGNMENT SCOPE AND METHOD FOR INSTRUMENTATION POSITION
by
AHN, SUNG MIN
,
JANG, SANG DON
,
SON
,
TAE KYU
Year of Publication
21.02.2012
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METHOD FOR CALCULATING POSITION AND ORIENTATION DATA OF 6 DEGREES OF FREEDOM STAGE
by
JANG, SANG DON
,
SON
,
TAE KYU
,
KIM, JA YUL
Year of Publication
26.02.2013
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APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF
by
JANG, SANG DON
,
SON
,
TAE KYU
,
KIM, JA YUL
Year of Publication
18.01.2013
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A WAFER CASSETTE PROTECTING APPARATUS
by
SON
,
TAE
-
KYU
Year of Publication
01.05.2000
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MASKLESS EXPOSURE APPARATUS AND METHOD FOR COMPENSATING CUMULATIVE INTENSITY OF ILLUMINATION USING THE SAME
by
JANG, SANG DON
,
SON
,
TAE KYU
,
KIM, JA YUL
,
LEE, SANG MIN
Year of Publication
12.09.2012
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REFRIGERATOR OPERATION SYSTEM BASED ON HEAT SOURCE COST AND ITS METHOD, ESPECIALLY COMPRISING LOAD RATIO CALCULATION UNIT AND REFRIGERATOR SELECTION UNIT
by
GWON, YOUNG WUAN
,
LEE, SOON MO
,
HUR, CHAN
,
SON
,
TAE KYU
Year of Publication
13.01.2005
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SPINDLE ASSEMBLY FOR SEMICONDUCTOR FABRICATION FACILITY
by
KIM, HO SIK
,
SON
,
TAE KYU
Year of Publication
15.04.2000
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WELDING MASK
by
LEE BANG-JUN
,
SON TAE
-
KYU
Year of Publication
18.08.1989
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Apparatus and method of controlling chuck, and exposure apparatus and control method thereof
by
Jang Sang Don
,
Son Tae Kyu
,
Kim Ja Yul
Year of Publication
29.11.2016
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MEASUREMENT SYSTEM USING ALIGNMENT SYSTEM AND POSITION MEASUREMENT METHOD
by
SON TAE KYU
,
AHN SUNG MIN
Year of Publication
21.02.2013
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Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography
by
SON TAE KYU
,
AHN SUNG MIN
,
JANG SANG DON
Year of Publication
17.06.2014
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APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF
by
SON TAE KYU
,
JANG SANG DON
,
KIM JA YUL
Year of Publication
02.06.2016
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Apparatus and method of controlling chuck, and exposure apparatus and control method thereof
by
SON TAE KYU
,
JANG SANG DON
,
KIM JA YUL
Year of Publication
15.03.2016
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Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof
by
SON TAE KYU
,
JANG SANG DON
,
KIM JA YUL
Year of Publication
30.06.2015
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MASKLESS EXPOSURE APPARATUS AND METHOD TO DETERMINE EXPOSURE START POSITION AND ORIENTATION IN MASKLESS LITHOGRAPHY
by
SON TAE KYU
,
AHN SUNG MIN
,
JANG SANG DON
Year of Publication
05.04.2012
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