정전 척 가스 전달을 위한 다공성 플러그
HUSAIN ANWAR, FRANKLIN TIMOTHY JOSEPH, CHANG XUE YANG, SOMMERS JOSEPH F, SULYMAN ALEXANDER
Year of Publication 09.07.2024
Get full text
Year of Publication 09.07.2024
Patent
순환 가스 채널들을 갖는 샤워헤드 조립체
WONG CARLATON, BEHNKE JOSEPH FREDERICK, FRANKLIN TIMOTHY JOSEPH, WAKABAYASHI REYN TETSURO, SOMMERS JOSEPH F
Year of Publication 05.03.2024
Get full text
Year of Publication 05.03.2024
Patent
내화학성 표면들을 갖는 RF 컴포넌트들
SUBRAMANI ANANTHA K, JANAKIRAMAN KARTHIK, SOMMERS JOSEPH F, SRINIVASAN SWAMINATHAN
Year of Publication 13.01.2022
Get full text
Year of Publication 13.01.2022
Patent
샤워헤드 조립체
WONG CARLATON, WAKABAYASHI REYN, BEHNKE JOSEPH FREDERICK, FRANKLIN TIMOTHY JOSEPH, SOMMERS JOSEPH F
Year of Publication 12.10.2022
Get full text
Year of Publication 12.10.2022
Patent
GEOMETRIES AND PATTERNS FOR SURFACE TEXTURING TO INCREASE DEPOSITION RETENTION
NISHIMURA YUKARI, LO SIO ON, SOMMERS JOSEPH F, LU WILLIAM MING YE, BALESAN RAJAN, WANG JIANQI
Year of Publication 17.06.2022
Get full text
Year of Publication 17.06.2022
Patent
GEOMETRIES AND PATTERNS FOR SURFACE TEXTURING TO INCREASE DEPOSITION RETENTION
NISHIMURA YUKARI, LO SIO ON, SOMMERS JOSEPH F, LU WILLIAM MING YE, BALESAN RAJAN, WANG JIANQI
Year of Publication 05.10.2021
Get full text
Year of Publication 05.10.2021
Patent
슬릿 밸브 게이트 코팅 및 슬릿 밸브 게이트들을 세정하기 위한 방법들
AMIR OFER, SOMMERS JOSEPH F, RICE MICHAEL R, KUCHAR MICHAEL C, SUN JENNIFER Y
Year of Publication 05.09.2018
Get full text
Year of Publication 05.09.2018
Patent
REAL TIME LIQUID PARTICLE COUNTER(LPC) END POINT DETECTION SYSTEM
BOYD WENDELL, SOMMERS JOSEPH F, DO DAVID, WANG JIANSHENG, PAPKE KEVIN A, STANCZYK BARBARA
Year of Publication 17.04.2014
Get full text
Year of Publication 17.04.2014
Patent
GEOMETRIES AND PATTERNS FOR SURFACE TEXTURING TO INCREASE DEPOSITION RETENTION
NISHIMURA YUKARI, LO SIO ON, SOMMERS JOSEPH F, LU WILLIAM MING YE, BALESAN RAJAN, WANG JIANQI
Year of Publication 18.05.2016
Get full text
Year of Publication 18.05.2016
Patent
METHOD AND APPARATUS FOR SHOWERHEAD CLEANING
SOMMERS JOSEPH F, ADAMALA SATYANARAYANA, DO DAVID, WANG JIANSHENG, TRAHAN RONALD
Year of Publication 04.07.2012
Get full text
Year of Publication 04.07.2012
Patent
EXTENDED LIFE TEXTURED CHAMBER COMPONENTS AND METHOD FOR FABRICATING SAME
SOO TIONG KHAI, YOSHIDOME GOICHI, SOMMERS JOSEPH F, LU WILLIAM MING YE, JACKSON MICHAEL, BOYD WENDELL G
Year of Publication 06.03.2014
Get full text
Year of Publication 06.03.2014
Patent
NON DESTRUCTIVE SELECTIVE DEPOSITION REMOVAL OF NON-METALLIC DEPOSITS FROM ALUMINUM CONTAINING SUBSTRATES
NISHIMURA YUKARI, BAO LIYUAN, JIANG ANBEI, LO SIO ON, SOMMERS JOSEPH F, TAN SAMANTHA S.H
Year of Publication 07.12.2011
Get full text
Year of Publication 07.12.2011
Patent
POROUS PLUG FOR ELECTROSTATIC CHUCK GAS DELIVERY
SULYMAN, Alexander, CHANG, Xue Yang, FRANKLIN, Timothy Joseph, HUSAIN, Anwar, SOMMERS, Joseph F
Year of Publication 09.10.2024
Get full text
Year of Publication 09.10.2024
Patent
RF COMPONENTS WITH CHEMICALLY RESISTANT SURFACES
JANAKIRAMAN, Karthik, SOMMERS, Joseph F, SRINIVASAN, Swaminathan, SUBRAMANI, Anantha K
Year of Publication 30.12.2021
Get full text
Year of Publication 30.12.2021
Patent