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Published in Materials (01.01.2020)
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Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition
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Published in Chemical vapor deposition (01.01.1999)
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Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition
Elers, K.-E., Saanila, V., Soininen, P. J., Li, W.-M., Kostamo, J. T., Haukka, S., Juhanoja, J., Besling, W. F. A.
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Published in Chemical vapor deposition (04.07.2002)
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ALE-reactor for large area depositions
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Published in Applied surface science (01.03.1997)
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Conference Proceeding
Control of Eu Oxidation State in Y 2 O 3-x S x :Eu Thin-Film Phosphors Prepared by Atomic Layer Deposition: A Structural and Photoluminescence Study
Rosa, José, Deuermeier, Jonas, Soininen, Pekka J, Bosund, Markus, Zhu, Zhen, Fortunato, Elvira, Martins, Rodrigo, Sugiyama, Mutsumi, Merdes, Saoussen
Published in Materials (23.12.2019)
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Published in Materials (23.12.2019)
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Precursor source arrangement and atomic layer deposition apparatus
Soininen, Pekka, Aminoff, Hulda, Soininen, Pekka J, Miikkulainen, Ville
Year of Publication 04.06.2024
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Year of Publication 04.06.2024
Patent
Picosun SUNALE ALD Systems for High Quality Nanocoatings - Bridging the Gap between R&D and Industrial Production
Toivola, Minna, Lehto, Tero, Li, Wei-Min, Pilvi, Tero, Soininen, Pekka J.
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Precursor source arrangement and atomic layer deposition apparatus
Soininen, Pekka, Aminoff, Hulda, Soininen, Pekka J, Miikkulainen, Ville
Year of Publication 21.08.2023
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Year of Publication 21.08.2023
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Atomic layer deposition apparatus
Soininen, Pekka, Aminoff, Hulda, Miikkulainen, Ville, Soininen, Pekka J
Year of Publication 25.04.2023
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Year of Publication 25.04.2023
Patent