Impact of secondary electron emission noise in SEM
Sakakibara, Makoto, Suzuki, Makoto, Tanimoto, Kenji, Sohda, Yasunari, Bizen, Daisuke, Nakamae, Koji
Published in Microscopy (06.08.2019)
Published in Microscopy (06.08.2019)
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Journal Article
Charge Modeling for Metal Layer on Insulating Substrate
Okai, Nobuhiro, Yano, Tasuku, Sohda, Yasunari
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Simulation of Limited-Area Cathode as Mask-Irradiation Source
Sohda, Yasunari, Tanimoto, Sayaka, Ohta, Hiroya
Published in Japanese Journal of Applied Physics (01.11.2007)
Published in Japanese Journal of Applied Physics (01.11.2007)
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Journal Article
Acceptance characterization of electron detector in SEM using stainless steel sphere
Sekiguchi, Takashi, Yao, Yuanzhao, Sonoda, Ryosuke, Sohda, Yasunari
Published in Microscopy (16.10.2024)
Published in Microscopy (16.10.2024)
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Journal Article
Charge Modeling for Metal Layer on Insulating Substrate
Okai, Nobuhiro, Yano, Tasuku, Sohda, Yasunari
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Preparatory Study for the Matrix-Pattern Imaging, EB System
Tanimoto, Sayaka, Someda, Yasuhiro, Okumura, Masahide, Ohta, Hiroya, Sohda, Yasunari, Saitou, Norio
Published in Japanese Journal of Applied Physics (01.10.2003)
Published in Japanese Journal of Applied Physics (01.10.2003)
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Journal Article
Dynamic blanking control of single column multi-electron-beam system
Kamimura, Osamu, Ohta, Hiroya, Tanimoto, Sayaka, Sakakibara, Makoto, Nakayama, Yoshinori, Sohda, Yasunari, Muraki, Masato, Gotoh, Susumu, Hosoda, Masaki, Someda, Yasuhiro, Tamamori, Kenji, Hirose, Futoshi, Nagae, Kenichi, Kato, Kazuhiko, Seto, Isamu, Kuwabara, Masamichi, Okunuki, Masahiko
Published in Physics procedia (01.08.2008)
Published in Physics procedia (01.08.2008)
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Journal Article
교정용 시료, 그것을 이용한 전자빔 조정 방법 및 전자빔 장치
OHTA HIROYA, ABE YUSUKE, SOHDA YASUNARI, BIZEN KAORI, NAKAYAMA YOSHINORI
Year of Publication 25.02.2020
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Year of Publication 25.02.2020
Patent
전자원 및 전자선 조사 장치
DOI TAKASHI, MATSUNAGA SOICHIRO, KAWANO HAJIME, SOHDA YASUNARI, KATAGIRI SOUICHI
Year of Publication 18.03.2019
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Year of Publication 18.03.2019
Patent
CORRECTION SAMPLE, AND ELECTRON BEAM ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE USING SAME
SOHDA Yasunari, NAKAYAMA Yoshinori, BIZEN Kaori, ABE Yusuke, OHTA Hiroya
Year of Publication 28.02.2019
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Year of Publication 28.02.2019
Patent
ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
SOHDA Yasunari, KATAGIRI Souichi, MATSUNAGA Soichiro, DOI Takashi, KAWANO Hajime
Year of Publication 15.03.2018
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Year of Publication 15.03.2018
Patent