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Published in Journal of physics. D, Applied physics (07.09.2004)
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Year of Publication 01.05.2014
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GROOVED POLISHING PAD FOR CHEMICAL AND MECHANICAL PLANARIZATION
JOSEPH K SO, DAVID SNYDER, PETER A BARK, VISHWANATHAN ARUN, LEE MELBOURNE COOK, JOHN VH ROBERTS, DAVID B JAMES
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Year of Publication 28.11.2013
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