Magnetron sputtering method, magnetron sputtering apparatus and magnet control system thereof
KO, MU-SEOK, KIM, JUNG-GUN, SO, BYUNG-HO, JUN, MYEOUNG-WOO, LEE, GU-HYUN
Year of Publication 21.06.2022
Get full text
Year of Publication 21.06.2022
Patent
Manufacturing method of electromagnet assembly
KO, MU-SEOK, JEON, YOUNG-KYU, KIM, JUNG-GUN, BYEON, DONG-BEOM, SO, BYUNG-HO
Year of Publication 21.04.2022
Get full text
Year of Publication 21.04.2022
Patent
Magnet structure, magent unit and sputtering apparatus having the same
WOO, CHANG-WON, JO, SUNG-KI, KIM, JUNG-GUN, KIM, SUN-YOUNG, SO, BYUNG-HO
Year of Publication 01.10.2021
Get full text
Year of Publication 01.10.2021
Patent
Method for manufacturing electromagnet assembly
KIM JUNG-GUN, SO BYUNG-HO, BYEON DONG-BEOM, JEON YOUNG-KYU, KO MU-SEOK
Year of Publication 06.08.2019
Get full text
Year of Publication 06.08.2019
Patent
Manufacturing method of electromagnet assembly
KO, MU-SEOK, JEON, YOUNG-KYU, KIM, JUNG-GUN, BYEON, DONG-BEOM, SO, BYUNG-HO
Year of Publication 16.03.2019
Get full text
Year of Publication 16.03.2019
Patent
Magnetron sputtering method, magnetron sputtering apparatus and magnet control system thereof
KO, MU-SEOK, KIM, JUNG-GUN, SO, BYUNG-HO, JUN, MYEOUNG-WOO, LEE, GU-HYUN
Year of Publication 16.10.2018
Get full text
Year of Publication 16.10.2018
Patent
Magnet structure, magent unit and sputtering apparatus having the same
WOO, CHANG-WON, JO, SUNG-KI, KIM, JUNG-GUN, KIM, SUN-YOUNG, SO, BYUNG-HO
Year of Publication 16.10.2018
Get full text
Year of Publication 16.10.2018
Patent
Substrate transfer apparatus
KIM, JONG DAE, KO, WON IL, LEE, SANG HO, SON, SEOUNG KYOUNG, KIM, JUNG GUN, HAN, EUNG YONG, KIM, SUN GIL, KIM, NAM HOON, CHEON, MIN HO, LEE, KI TAE, SO, BYUNG HO
Year of Publication 21.03.2017
Get full text
Year of Publication 21.03.2017
Patent
Substrate transfer apparatus
SON SEOUNG-KYOUNG, CHEON MIN-HO, LEE KI-TAE, HAN EUNG-YONG, KIM JUNG-GUN, SO BYUNG-HO, KIM SUN-GIL, KIM NAM-HOON, LEE SANG-HO, KIM JONG-DAE, KO WON-IL
Year of Publication 05.10.2016
Get full text
Year of Publication 05.10.2016
Patent
Substrate transfer apparatus
KO, WON-IL, LEE, SANG-HO, KIM, JUNG-GUN, KIM, JONG-DAE, SO, BYUNG-HO, SON, SEOUNG-KYOUNG, HAN, EUNG-YONG, KIM, NAM-HOON, KIM, SUN-GIL, LEE, KI-TAE, CHEON, MIN-HO
Year of Publication 01.09.2016
Get full text
Year of Publication 01.09.2016
Patent