Thin film atomic layer deposition equipment for semiconductor processing
Sneh, Ofer, Clark-Phelps, Robert B, Londergan, Ana R, Winkler, Jereld, Seidel, Thomas E
Published in Thin solid films (2002)
Published in Thin solid films (2002)
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Journal Article
Growth of SiO2 at room temperature with the use of catalyzed sequential half-reactions
KLAUS, J. W, SNEH, O, GEORGE, S. M
Published in Science (American Association for the Advancement of Science) (12.12.1997)
Published in Science (American Association for the Advancement of Science) (12.12.1997)
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Journal Article