PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
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Year of Publication 13.06.2022
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플라즈마 식각 프로세스들에서, 코팅된 부분들을 사용한 프로세스 윈도우 확장
LUBOMIRSKY DMITRY, TAN TIEN FAK, YANG DONGQING, HILLMAN PETER, XIA MING, ZHU LALA, INGLE NITIN K, SNEDIGAR CHRISTOPHER
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Year of Publication 13.03.2020
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Process window widening using coated parts in plasma etch processes
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Year of Publication 24.08.2021
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Year of Publication 24.08.2021
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PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
Ingle, Nitin K, Lubomirsky, Dmitry, Snedigar, Christopher, Tan, Tien Fak, Yang, Dongqing, Zhu, Lala, Hillman, Peter, Xia, Ming
Year of Publication 05.09.2019
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Year of Publication 05.09.2019
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Process window widening using coated parts in plasma etch processes
Ingle, Nitin K, Lubomirsky, Dmitry, Snedigar, Christopher, Tan, Tien Fak, Yang, Dongqing, Zhu, Lala, Hillman, Peter, Xia, Ming
Year of Publication 21.05.2019
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Year of Publication 21.05.2019
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PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
HILLMAN, Peter, INGLE, Nitin K, YANG, Dongqing, TAN, Tien Fak, XIA, Ming, LUBOMIRSKY, Dmitry, SNEDIGAR, Christopher, ZHU, Lala
Year of Publication 14.02.2019
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Year of Publication 14.02.2019
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PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
Ingle, Nitin K, Lubomirsky, Dmitry, Snedigar, Christopher, Tan, Tien Fak, Yang, Dongqing, Zhu, Lala, Hillman, Peter, Xia, Ming
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
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Process window widening using coated parts in plasma etch processes
LUBOMIRSKY, DMITRY, ZHU, LALA, INGLE, NITIN K, SNEDIGAR, CHRISTOPHER, XIA, MING, YANG, DONGQING, HILLMAN, PETER, TAN, TIEN FAK
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
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Process margin widening using coated parts in plasma etch processes
LUBOMIRSKY DMITRY, TAN TIEN FAK, YANG DONGQING, HILLMAN PETER, XIA MING, ZHU LALA, INGLE NITIN K, SNEDIGAR CHRISTOPHER
Year of Publication 10.04.2020
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Year of Publication 10.04.2020
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Process window widening using coated parts in plasma etch processes
ZHU, LA-LA, LUBOMIRSKY, DMITRY, INGLE, NITIN K, SNEDIGAR, CHRISTOPHER, XIA, MING, YANG, DONGQING, HILLMAN, PETER, TAN, TIEN FAK
Year of Publication 01.04.2019
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Year of Publication 01.04.2019
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