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Year of Publication 11.10.2022
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Year of Publication 11.10.2022
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Year of Publication 20.12.2021
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Year of Publication 20.12.2021
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Year of Publication 16.07.2020
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Year of Publication 16.07.2020
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SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
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Year of Publication 04.08.2022
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Year of Publication 04.08.2022
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METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
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Year of Publication 08.02.2024
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Year of Publication 08.02.2024
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Method for controlling a manufacturing process and associated apparatuses
Ten Berge, Peter, Smorenberg, Pieter Gerardus Jacobus, Elbattay, Khalid, Steen, Steven Erik
Year of Publication 26.09.2023
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Year of Publication 26.09.2023
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SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, DERWIN, Paul, ELBATTAY, Khalid, SAPUTRA, Putra
Year of Publication 20.01.2021
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Year of Publication 20.01.2021
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METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
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Year of Publication 20.09.2023
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Year of Publication 20.09.2023
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SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
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Year of Publication 14.09.2023
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Year of Publication 14.09.2023
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METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
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Year of Publication 30.08.2023
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Year of Publication 30.08.2023
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METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
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Year of Publication 18.08.2022
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Year of Publication 18.08.2022
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METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
TEN BERGE, Peter, STEEN, Steven, Erik, ELBATTAY, Khalid, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 22.09.2021
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Year of Publication 22.09.2021
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METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
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Year of Publication 05.07.2023
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Year of Publication 05.07.2023
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Method for controlling a manufacturing apparatus and associated apparatuses
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Year of Publication 06.06.2023
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Year of Publication 06.06.2023
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Sub-field control of a lithographic process and associated apparatus
Thijssen, Theo Wilhelmus Maria, Meijerink, Rowin, Smorenberg, Pieter Gerardus Jacobus, Elbattay, Khalid, Komatsu, Masaya, Saputra, Putra, Derwin, Paul, Hlaing, Ma Su Su, Zhong, Bo
Year of Publication 30.05.2023
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Year of Publication 30.05.2023
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COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL
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Year of Publication 17.11.2022
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Year of Publication 17.11.2022
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Year of Publication 20.09.2022
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Year of Publication 20.09.2022
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