Method for selective oxide etching in pre-metal deposition
LOONG, SANG YEE, ISMAIL, ZAINAB BTE, SIH, VICENT, CHOOI, SIMON, ZHOU, MEI SHENG, EE, PING YU
Year of Publication 23.05.2001
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Year of Publication 23.05.2001
Patent
Apparatus and methods to clean copper contamination on wafer edge
YI XU, ZHOU MEI SHENG, ALIYU YAKUB, CHOOI SIMON, HO PAUL KWOK KEUNG, SUDIJONO JOHN LEONARD, ROY SUDIPTO RANENDRA, GUPTA SUBHASH
Year of Publication 31.07.2003
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Year of Publication 31.07.2003
Patent
METHOD FOR CLEANING SEMICONDUCTOR STRUCTURES USING HYDROCARBON AND SOLVENTS IN A REPETITIVE VAPOR PHASE/LIQUID PHASE SEQUENCE
YAKUB ALIYU, YI XU, MEI SHENG, ZHOU, PAUL HO KWOK KEUNG, SUBHASH GUPTA, SUDIPTO RANENDRA ROY, JOHN LEONARD SUDIJONO, SIMON CHOOI
Year of Publication 16.06.2003
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Year of Publication 16.06.2003
Patent
METHOD OF APPLICATION OF COPPER SOLUTION IN FLIP-CHIP, COB, AND MICROMETAL BONDING
YAKUB ALIYU, YI XU, MEI SHENG ZHOU, SUBHASH GUPTA, HO KWOK KEUNG PAUL, JOHN LEONARD SUDIJONO, SUDIPTO RANENDRA ROY, SIMON CHOOI
Year of Publication 23.05.2003
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Year of Publication 23.05.2003
Patent
METHOD TO CREATE COPPER TRAPS BY MODIFYING TREATMENT ON THE DIELECTRICS SURFACE
JOHN SUDIJONO, YAKUB ALIYU, MEI SHENG ZHOU, YI XU, SUBHASH GUPTA, PAUL HO KWOK KEUNG, SUDIPTO RANENDRA ROY, SIMON CHOOI
Year of Publication 23.04.2003
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Year of Publication 23.04.2003
Patent
METHOD TO REMOVE COPPER CONTAMINATION BY USING DOWNSTREAM OXYGEN AND CHELATING AGENT PLASMA
JOHN SUDIJONO, YAKUB ALIYU, MEI SHENG ZHOU, YI XU, SUBHASH GUPTA, PAUL HO, SUDIPTO RANENDRA ROY, SIMON CHOOI
Year of Publication 19.11.2002
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Year of Publication 19.11.2002
Patent
Method of manufacturing embedded organic stop layer for dual damascene patterning
ZHOU MEI SHENG, XU YI, ALIYU YAKUB, HO PAUL KWOK KEUNG, CHOOI SIMON, SUDIJONO JOHN LEONARD, ROY SUDIPTO RANENDRA, GUPTA SUBHASH
Year of Publication 05.11.2002
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Year of Publication 05.11.2002
Patent
Method to remove copper contamination by using downstream oxygen and chelating agent plasma
ALIYU, YAKUB, CHOOI, SIMON, SUDIJONO, JOHN, ZHOU, MEI SHENG, SUDIPTO RANENDRA, ROY, HO, PAUL, GUPTA, SUBHASH, XU, YI
Year of Publication 30.10.2002
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Year of Publication 30.10.2002
Patent
Method to create copper traps by modifying treatment on the dielectrics surface
ZHOU MEI SHENG, XU YI, ALIYU YAKUB, SUDIJONO JOHN, CHOOI SIMON, HO PAUL KWOK KEUNG, ROY SUDIPTO RANENDRA, GUPTA SUBHASH
Year of Publication 06.08.2002
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Year of Publication 06.08.2002
Patent
Method for cleaning semiconductor structures using hydrocarbon and solvents in a repetitive vapor phase/liquid phase sequence
XU YI, ZHOU MEI SHENG, ALIYU YAKUB, CHOOI SIMON, HO PAUL KWOK KEUNG, SUDIJONO JOHN LEONARD, ROY SUDIPTO RANENDRA, GUPTA SUBHASH
Year of Publication 25.07.2002
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Year of Publication 25.07.2002
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Method of application of displacement reaction to form a conductive cap layer for flip-chip, COB, and micro metal bonding
Ho, Kwok Keung Paul, Xu, Yi, Chooi, Simon, Aliyu, Yakub, Zhou, Mei Sheng, Sudijono, John Leonard, Gupta, Subhash, Roy, Sudipto Ranendra
Year of Publication 09.07.2002
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Year of Publication 09.07.2002
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