A Systematic Study on BEOL Defectivity Control for Future AI Application
Chen, James H.-C., Lie, Fee li, DeVries, Scott, Boye, Carol, Mehta, Sanjay, Devarajan, Thamarai S., Silvestre, Mary-Claire, Tseng, Wei-Tsu, Aminpur, Massud A
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
A study on the interaction between barrier and plating causing edge stringer defects in 28nm
Ramanathan, Eswar, Smith, Frank, Fiacco, Antonio, Silvestre, Mary Claire, Parks, Val, Rajagopalan, Balajee, Scott, Hildreth, Barker, John, Riendeau, Jeffrey, Laloe, Jean-Baptiste
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
A Study of Metal on Metal Multiple Patterning Scheme
Chen, James Hsueh-Chung, Silvestre, Mary-Claire, Ghosh, Somnath, Mignot, Yann, Kelly, James J., Clevenger, Lawrence A., Spooner, Terry A.
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
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Conference Proceeding
Bevel rinse optimization for reduced edge defectivity and improved edge yield
Silvestre, Mary Claire, Ramanathan, Eswar, Hildreth, Scott, Duggan, Mark, Riendeau, Jeffrey, Dumas, Laurent
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Nested interconnect macro electrical yield improvement for advanced triple patterning integration
Silvestre, Mary Claire, He, Ming, Mahalingam, Anbu Selvam K M, Child, Craig, Roux, Alycia, Low, Chun Hui, Fisher, Daniel, Zhou, Yue, Park, DeNeil, Karakoy, Mert
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Hammer test to detect BEOL process marginalities on via chains in advanced nodes
Mahalingam, Anbu Selvam Km, Silvestre, Mary Claire, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Trench first metal hardmask post-lithography novel rework process for defectivity and yield improvement
Silvestre, Mary Claire, Gogna, Mukesh, Mahalingam, Anbu Selvam K. M., Ramanathan, Eswar, Ordonio, Christopher, Schaller, John
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Optimizing Cu barrier thickness for interconnects performance, reliability and yield
Tian Shen, Rajagopalan, Balajee, Silvestre, Mary Claire, Ramanathan, Eswar, Mahalingam, Anbu Selvam K. M., Wenyi Zhang, Kong Boon Yeap, Justison, Patrick
Published in 2016 IEEE International Reliability Physics Symposium (IRPS) (01.04.2016)
Published in 2016 IEEE International Reliability Physics Symposium (IRPS) (01.04.2016)
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Conference Proceeding
Extra-pattern killer defectivity improvement and enhancement of within-feature barrier coverage by optimization of TaN barrier PVD process in 90p Cu wire interconnects for 28nm technology
Rajagopalan, Balajee, Laloe, Jean-Baptiste, Silvestre, Mary Claire, Ramanathan, Eswar, Khanal, Sohana, Laval, Alain, Ge, Qian, Takahashi, Nobuyuki, Mahalingam, Anbu Selvam, Liew, San Leong, Teagle, Robert
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Effect of top corner rounding in BEOL to yield in advanced technologies
Ramanathan, Eswar, Silvestre, Mary Claire, Mahalingam, Anbu Selvam Km, Garg, Niti, Siddhartha, Siddhartha, Ordonio, Christopher, Schaller, John
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Vertical natural capacitor time dependent dielectric breakdown (TDDB) improvement in 28nm
Silvestre, Mary Claire, Wenyi, Zhang Galor, Selvam, Km Mahalingam Anbu, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John, Lee Jong Hyup, Capasso, Cristiano, Justison, Patrick
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
X-RAY SHIELDING STRUCTURE FOR A CHIP
Silvestre, Mary Claire, Chen, Hsueh-Chung, Mignot, Yann, Leobandung, Effendi
Year of Publication 23.03.2023
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Year of Publication 23.03.2023
Patent
Wafer backside engineering for wafer stress control
Silvestre, Mary Claire, Chen, Hsueh-Chung, Shobha, Hosadurga, Jain, Nikhil
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
Patent
RRAM with high work function cap
Seo, Soon-Cheon, Silvestre, Mary Claire Micaller, Liu, Xuefeng, Ando, Takashi, Park, Chanro, Sung, Min Gyu
Year of Publication 04.06.2024
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Year of Publication 04.06.2024
Patent
RRAM CELL WITH NONPLANAR METAL OXIDE LAYER
LIU, Xuefeng, ANDO, Takashi, SUNG, Min Gyu, PARK, Chanro, SILVESTRE, Mary Claire, SEO, Soon-Cheon
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
RRAM WITH HIGH WORK FUNCTION CAP
Seo, Soon-Cheon, PARK, CHANRO, Silvestre, Mary Claire Micaller, Liu, Xuefeng, Ando, Takashi, Sung, Min Gyu
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
In-memory Realization of In-situ Few-shot Continual Learning with a Dynamically Evolving Explicit Memory
Karunaratne, Geethan, Hersche, Michael, Langenegger, Jovin, Cherubini, Giovanni, Gallo-Bourdeau, Manuel Le, Egger, Urs, Brew, Kevin, Choi, Sam, OK, INJO, Silvestre, Mary Claire, Li, Ning, Saulnier, Nicole, Chan, Victor, Ahsan, Ishtiaq, Narayanan, Vijay, Benini, Luca, Sebastian, Abu, Rahimi, Abbas
Year of Publication 14.07.2022
Year of Publication 14.07.2022
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Journal Article