APPARATUS WITH PLASMA RADIATION SOURCE, METHOD OF FORMING A BEAM OF RADIATION AND LITHOGRAPHIC APPARATUS
IVANOV VLADIMIR VITALEVITCH, SIDELNIKOV YURII VICTOROVITCH, BANINE VADIM YEVGENYEVICH, KRIVTSUN VLADIMIR MIHAILOVITCH, KOROP EVGENY DMITRIEVICH, YAKUSHEV OLEG, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 09.04.2012
Get full text
Year of Publication 09.04.2012
Patent
LASER GENERATING PLASMA RADIATION SYSTEM WITH FOIL TRAP TO PREVENT COLLECTOR FROM BEING CONTAMINATED BY PARTICLES FROM RADIATION SOURCE WHILE NOT DISTURBING RADIOACTIVE RAYS
SIDELNIKOV, YURII VICTOROVITCH, BAKKER, LEVINUS PIETER, SCHUURMANS, FRANK JEROEN PIETER, BANINE, VADIM YEVGENYEVICH, KURT, RALPH
Year of Publication 06.01.2005
Get full text
Year of Publication 06.01.2005
Patent
Lithographic apparatus
IVANOV VLADIMIR VITALEVICH, SIDELNIKOV YURII VICTOROVITCH, BANINE VADIM YEVGENYEVICH, KOSHELEV KONSTANTIN NIKOLAEVICH, KRIVTSUN VLADIMIR MIHAILOVITCH, GIELISSEN KURT, GLUSHKOV DENIS ALEXANDROVICH, YAKUSHEV OLEG, ZUKAKISHVILI GIVI GEORGIEVICH
Year of Publication 05.04.2016
Get full text
Year of Publication 05.04.2016
Patent
APPARATUS AND METHOD FOR FORMING A BEAM OF ELECTROMAGNETIC RADIATION WITH A PLASMA RADIATION SOURCE, AND LITHOGRAPHIC APPARATUS
KRIVTSUN, VLADIMIR MIHAILOVITCH, SIDELNIKOV, YURII VICTOROVITCH, KOROP, EVGENY DMITRIEVICH, YAKUSHEV, OLEG, KOSHELEV, KONSTANTIN NIKOLAEVITCH, BANINE, VADIM YEVGENYEVICH, IVANOV, VLADIMIR VITALEVITCH
Year of Publication 07.05.2014
Get full text
Year of Publication 07.05.2014
Patent
Apparatus with plasma radiation source and method of forming a beam of radiation
Krivtsun, Vladimir Mihailovitch, Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vitalevich, Korop, Evgeny Dmitrievich, Koshelev, Konstantin Nikolaevich, Sidelnikov, Yurii Victorovitch, Yakushev, Oleg
Year of Publication 23.10.2012
Get full text
Year of Publication 23.10.2012
Patent
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
IVANOV VLADIMIR VITALEVICH, SIDELNIKOV YURII VICTOROVITCH, BANINE VADIM YEVGENYEVICH, KOSHELEV KONSTANTIN NIKOLAEVICH, KRIVTSUN VLADIMIR MIHAILOVITCH, KOROP EVGENY DMITRIEVICH, YAKUSHEV OLEG
Year of Publication 23.10.2012
Get full text
Year of Publication 23.10.2012
Patent
EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
KOSHELEV, KONSTANTIN, NIKOLAEVICH, KRIVTSUN, VLADIMIR, MIHAILOVITCH, FRIJNS, OLAV, WALDEMAR, VLADIMIR, SIDELNIKOV, YURII, VICTOROVITCH, BANINE, VALDIM, YEVGENYEVICH
Year of Publication 06.10.2010
Get full text
Year of Publication 06.10.2010
Patent
SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS, METHOD FOR REMOVING CONTAMINANT PARTICLES AND METHOD FOR MANUFACTURING A DEVICE
SCACCABAROZZI LUIGI, LOOPSTRA ERIK ROELOF, IVANOV VLADIMIR VITALEVICH, SIDELNIKOV YURII VICTOROVITCH, NEERHOF HENDRIK ANTONY JOHANNES, BANINE VADIM YEVGENYEVICH, ANTSIFEROV PAVEL STANISLAVOVICH, BRULS RICHARD JOSEPH, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 21.03.2013
Get full text
Year of Publication 21.03.2013
Patent
APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM OF RADIATION AND LITHOGRAPHIC APPARATUS
DMITRIEVICH KOROP EVGENY, SIDELNIKOV YURII VICTOROVITCH, YEVGENYEVICH BANINE VADIM, KRIVTSUN VLADIMIR MIHAILOVITCH, VITALEVICH IVANOV VLADIMIR, NIKOLAEVICH KOSHELEV KONSTANTIN, YAKUSHEV OLEG
Year of Publication 20.01.2011
Get full text
Year of Publication 20.01.2011
Patent
EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
KOSHELEV, KONSTANTIN, NIKOLAEVICH, KRIVTSUN, VLADIMIR, MIHAILOVITCH, FRIJNS, OLAV, WALDEMAR, VLADIMIR, SIDELNIKOV, YURII, VICTOROVITCH, BANINE, VALDIM, YEVGENYEVICH
Year of Publication 09.07.2009
Get full text
Year of Publication 09.07.2009
Patent
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
IVANOV VLADIMIR VITALEVICH, SIDELNIKOV YURII VICTOROVITCH, KRIVTSUN VLADIMIR MIHALLOVITCH, BANINE VADIM YEVGENYEVICH, KOSHELEV KONSTANTIN NIKOLAEVICH, KOROP EVGENY DMITRIEVICH, YAKUSHEV OLEG
Year of Publication 02.11.2010
Get full text
Year of Publication 02.11.2010
Patent
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
Krivtsun, Vladimir Mihallovitch, Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vitalevich, Korop, Evgeny Dmitrievich, Koshelev, Konstantin Nikolaevich, Sidelnikov, Yurii Victorovitch, Yakushev, Oleg
Year of Publication 02.11.2010
Get full text
Year of Publication 02.11.2010
Patent
Lithographic apparatus, radiation system and device manufacturing method
IVANOV VLADIMIR VITALEVITCH, SIDELNIKOV YURII VICTOROVITCH, GAYAZOV ROBERT RAFILEVITCH, BANINE VADIM YEVGENYEVICH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 13.09.2011
Get full text
Year of Publication 13.09.2011
Patent
Lithographic apparatus, radiation system and device manufacturing method
Gayazov, Robert Rafilevitch, Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vitalevitch, Korob, Evgenii Dmitreevitch, Koshelev, Konstantin Nikolaevitch, Zukavishvili, Givi Georgievitch, Sidelnikov, Yurii Victorovitch
Year of Publication 13.09.2011
Get full text
Year of Publication 13.09.2011
Patent
APPARATUS AND METHOD FOR FORMING A BEAM OF ELECTROMAGNETIC RADIATION WITH A PLASMA RADIATION SOURCE, AND LITHOGRAPHIC APPARATUS
KRIVTSUN, VLADIMIR MIHAILOVITCH, SIDELNIKOV, YURII VICTOROVITCH, KOROP, EVGENY DMITRIEVICH, YAKUSHEV, OLEG, KOSHELEV, KONSTANTIN NIKOLAEVITCH, BANINE, VADIM YEVGENYEVICH, IVANOV, VLADIMIR VITALEVITCH
Year of Publication 28.10.2009
Get full text
Year of Publication 28.10.2009
Patent
APPARATUS WITH PLASMA RADIATION SOURCE, METHOD OF FORMING A BEAM OF RADIATION AND LITHOGRAPHIC APPARATUS
KRIVTSUN, VLADIMIR MIHAILOVITCH, SIDELNIKOV, YURII VICTOROVITCH, KOROP, EVGENY DMITRIEVICH, YAKUSHEV, OLEG, KOSHELEV, KONSTANTIN NIKOLAEVITCH, BANINE, VADIM YEVGENYEVICH, IVANOV, VLADIMIR VITALEVITCH
Year of Publication 21.08.2008
Get full text
Year of Publication 21.08.2008
Patent