Design and fabrication of condenser microphone using wafer transfer and micro-electroplating technique
SHU, Zhen-Zhun, KE, Ming-Li, CHEN, Guan-Wei, HORNG, Ray-Hua, CHANG, Chao-Chih, TSAI, Jean-Yih, LAI, Chung-Ching, CHEN, Ji-Liang
Published in 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (01.04.2008)
Published in 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (01.04.2008)
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Conference Proceeding
A Study of High Sensitive Diaphragm for Silicon Microphone Applications
Ray-Hua Horng, Zong-Ying Lin, Yu-Ning Jiang, Shang-Hua You, Shu-Zhen Zhun, Ru-Guan Wang, Shao-Chih Chang, Tsun-I Tsai, Chung-Chi Lai, Chi-Liang Chen
Published in 2006 International Microsystems, Package, Assembly Conference Taiwan (01.10.2006)
Published in 2006 International Microsystems, Package, Assembly Conference Taiwan (01.10.2006)
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Conference Proceeding
Design And Fabrication of Condenser Microphone Using Wafer Transfer And Micro-electroplating Technique
Shu, Zhen-Zhun, Ke, Ming-Li, Chen, Guan-Wei, Horng, Ray Hua, Chang, Chao-Chih, Tsai, Jean-Yih, Lai, Chung-Ching, Chen, Ji-Liang
Year of Publication 07.05.2008
Year of Publication 07.05.2008
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Journal Article