반도체 검사 장치 및 반도체 시료의 검사 방법
TAKADA SATOSHI, SHOUJI MINAMI, SAKAKIBARA MAKOTO, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 10.03.2023
Get full text
Year of Publication 10.03.2023
Patent
하전 입자선 장치
SHOUJI MINAMI, KITSUKI HIROHIKO, OHTA HIROYA, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 07.03.2023
Get full text
Year of Publication 07.03.2023
Patent
SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR SAMPLE INSPECTION METHOD
SHIRASAKI Yasuhiro, SAKAKIBARA Makoto, TSUNO Natsuki, TAKADA Satoshi, SHOUJI Minami
Year of Publication 07.04.2022
Get full text
Year of Publication 07.04.2022
Patent
CHARGED PARTICLE BEAM DEVICE
SHIRASAKI Yasuhiro, KITSUKI Hirohiko, TSUNO Natsuki, SHOUJI Minami, OHTA Hiroya
Year of Publication 31.03.2022
Get full text
Year of Publication 31.03.2022
Patent
하전 입자선 장치
NAKAMURA YOHEI, SASAKI YUKO, SHOUJI MINAMI, SHIRASAKI YASUHIRO, MITSUGI SHOTA, TSUNO NATSUKI
Year of Publication 12.05.2023
Get full text
Year of Publication 12.05.2023
Patent
검사 시스템
BIZEN DAISUKE, NAKAMURA YOHEI, TAKADA SATOSHI, SHOUJI MINAMI, SUZUKI MAKOTO, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 24.03.2023
Get full text
Year of Publication 24.03.2023
Patent
CHARGED PARTICLE BEAM APPARATUS
NAKAMURA YOHEI, SHOUJI MINAMI, FUKUDA MUNEYUKI, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 10.03.2021
Get full text
Year of Publication 10.03.2021
Patent
CHARGED PARTICLE BEAM APPARATUS
TAKADA SATOSHI, SHOUJI MINAMI, FUKUDA MUNEYUKI, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 10.03.2021
Get full text
Year of Publication 10.03.2021
Patent
CHARGED PARTICLE BEAM DEVICE
SHIRASAKI Yasuhiro, TSUNO Natsuki, NAKAMURA Yohei, MITSUGI Shota, SASAKI Yuko, SHOUJI Minami
Year of Publication 05.05.2022
Get full text
Year of Publication 05.05.2022
Patent
INSPECTION SYSTEM
SUZUKI Makoto, SHIRASAKI Yasuhiro, TSUNO Natsuki, NAKAMURA Yohei, BIZEN Daisuke, TAKADA Satoshi, SHOUJI Minami
Year of Publication 24.03.2022
Get full text
Year of Publication 24.03.2022
Patent
SAMPLE HOLDER, OBSERVATION SYSTEM, AND IMAGE GENERATION METHOD
MORISHITA HIDEO, SHOUJI MINAMI, HARADA KUNIO, OOMINAMI YUUSUKE, OHSHIMA TAKASHI
Year of Publication 27.08.2015
Get full text
Year of Publication 27.08.2015
Patent
CHARGED PARTICLE BEAM APPARATUS
HISADA AKIKO, SHOUJI MINAMI, OKUMURA TAIGA, YONEYAMA AKIO, OOMINAMI YUUSUKE, OHSHIMA TAKASHI
Year of Publication 02.06.2016
Get full text
Year of Publication 02.06.2016
Patent