Search Results - "SHKLOVER, VITALIY" :: K.UTB vyhledávací portál

by MEIER ROBERT, KUZNETSOV ALEXEY, KIEREY HOLGER, NOTTBOHM CHRISTOPH, SHKLOVER VITALIY, SCHMITTNER ARNO, JALICS CHRISTOF, WINTER RALF, EVA ERIC, MERKEL WOLFGANG
Year of Publication 26.07.2019

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Method for forming nanostructures on a surface and optical element

by Shklover, Vitaliy, Pazidis, Alexandra
Year of Publication 14.05.2024

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METHOD FOR MANUFACTURING AN OPTICAL ELEMENT, APPARATUS FOR MANUFACTURING AN OPTICAL ELEMENT, OPTICAL ELEMENT, AND LITHOGRAPHY SYSTEM

by STROBEL, Sebastian, SHKLOVER, Vitaliy
Year of Publication 13.12.2023

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Method for in-situ dynamic protection of a surface and optical assembly

by Shklover, Vitaliy, Erxmeyer, Jeffrey
Year of Publication 20.06.2023

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METHOD FOR IN-SITU DYNAMIC PROTECTION OF A SURFACE AND OPTICAL ASSEMBLY

by ERXMEYER, Jeffrey, SHKLOVER, Vitaliy
Year of Publication 04.11.2021

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METHOD FOR FORMING NANOSTRUCTURES ON A SURFACE AND OPTICAL ELEMENT

by PAZIDIS, Alexandra, SHKLOVER, Vitaliy
Year of Publication 23.09.2021

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Reflective optical element for grazing incidence in the EUV wavelength range

by Shklover Vitaliy
Year of Publication 11.07.2017

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Optisches Element, insbesondere zur Reflexion von EUV-Strahlung, optische Anordnung und Verfahren zum Herstellen eines optischen Elements

by Shklover, Vitaliy
Year of Publication 05.05.2022

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OPTICAL ELEMENT, IN PARTICULAR FOR REFLECTING EUV RADIATION, OPTICAL ARRANGEMENT, AND METHOD FOR MANUFACTURING AN OPTICAL ELEMENT

by SHKLOVER, Vitaliy
Year of Publication 05.05.2022

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METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM

by WEBER, Joern, GONCHAR, Anastasia, SHKLOVER, Vitaliy
Year of Publication 17.08.2023

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METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM

by WEBER, Joern, GONCHAR, Anastasia, SHKLOVER, Vitaliy
Year of Publication 09.08.2023

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