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"SHIRLEY, PAUL D"
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"SHIRLEY, PAUL D"
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METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRATE SUPPORT APPARATUS
by
Shirley
,
Paul D
Year of Publication
05.01.2023
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Methods and apparatus for adjusting surface topography of a substrate support apparatus
by
Shirley
,
Paul D
Year of Publication
20.09.2022
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METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRATE SUPPORT APPARATUS
by
Shirley
,
Paul D
Year of Publication
04.02.2021
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Method and apparatus for adjusting support element
by
SHIRLEY PAUL D
Year of Publication
02.02.2021
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METHOD AND APPARATUS FOR CONTROLLING AIR OVER A SPINNING MICROELECTRONIC SUBSTRATE
by
SHIRLEY
,
PAUL
,
D
Year of Publication
21.10.2009
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Methods of patterning positive photoresist
by
Shirley
,
Paul D
,
Mori, Hiroyuki
Year of Publication
28.02.2012
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Methods of patterning positive photoresist
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
28.02.2012
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Methods Of Patterning Positive Photoresist
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
09.09.2010
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Systems and methods for manipulating liquid films on semiconductor substrates
by
Shirley
,
Paul D
,
Mori, Hiroyuki
Year of Publication
15.06.2010
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Systems and methods for manipulating liquid films on semiconductor substrates
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
15.06.2010
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Device and method for forming improved resist layer
by
SHIRLEY PAUL D
Year of Publication
23.11.2006
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SYSTEMS AND METHODS FOR MANIPULATING LIQUID FILMS ON SEMICONDUCTOR SUBSTRATES
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
12.03.2009
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Systems and methods for manipulating liquid films on semiconductor substrates
by
Shirley
,
Paul D
,
Mori, Hiroyuki
Year of Publication
30.12.2008
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Systems and methods for manipulating liquid films on semiconductor substrates
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
30.12.2008
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Device and method for forming improved resist layer
by
SHIRLEY PAUL D
Year of Publication
11.08.2005
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Method and apparatus for controlling air over a spinning microelectronic substrate
by
Shirley
,
Paul D
Year of Publication
29.03.2005
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Method and apparatus for controlling air over a spinning microelectronic substrate
by
SHIRLEY PAUL D
Year of Publication
29.03.2005
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Method and apparatus for controlling a temperature of a microelectronic substrate
by
SHIRLEY PAUL D
Year of Publication
14.12.2004
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Method and apparatus for controlling a temperature of a microelectronic substrate
by
Shirley
,
Paul D
Year of Publication
14.12.2004
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Systems and methods for manipulating liquid films on semiconductor substrates
by
SHIRLEY PAUL D
,
MORI HIROYUKI
Year of Publication
23.08.2007
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