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Year of Publication 17.05.2024
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Year of Publication 17.05.2024
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가열 및 척킹 능력들을 갖는 정전 척
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Year of Publication 11.04.2023
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Year of Publication 11.04.2023
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고온 및 진공 격리 프로세싱 미니 환경들
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Year of Publication 03.02.2023
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Year of Publication 03.02.2023
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEMICONDUCTOR PROCESS EQUIPMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 09.05.2024
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Year of Publication 09.05.2024
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SEALING DEVICE FOR A PEDESTAL ASSEMBLY
BREZOCZKY, Thomas, SHIRAHATTI, Lakshmikanth Krishnamurthy, SUBBUSWAMY, Ganesh, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
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SYSTEM FOR UNIFORM TEMPERATURE CONTROL OF CLUSTER PLATFORMS
BREZOCZKY, Thomas, DESAI, Prashant A, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 20.04.2023
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Year of Publication 20.04.2023
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SYSTEM FOR UNIFORM TEMPERATURE CONTROL OF CLUSTER PLATFORMS
BREZOCZKY, Thomas, DESAI, Prashant A, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 13.04.2023
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Year of Publication 13.04.2023
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Electrostatic chuck having a heating and chucking capabilities
Shirahatti, Lakshmikanth Krishnamurthy, Prasad, Bhaskar, Satyavolu, Nitin Bharadwaj, Savandaiah, Kirankumar Neelasandra, Yedla, Srinivasa Rao, Rajendran, Hari Prasath, Brezoczky, Thomas
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
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